JPS53117389A - Semiconductor integrated circuit device - Google Patents
Semiconductor integrated circuit deviceInfo
- Publication number
- JPS53117389A JPS53117389A JP3255877A JP3255877A JPS53117389A JP S53117389 A JPS53117389 A JP S53117389A JP 3255877 A JP3255877 A JP 3255877A JP 3255877 A JP3255877 A JP 3255877A JP S53117389 A JPS53117389 A JP S53117389A
- Authority
- JP
- Japan
- Prior art keywords
- integrated circuit
- semiconductor integrated
- circuit device
- conneft
- diffusing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Abstract
PURPOSE: To conneft metal wirings of the front and back by the through-layers comprising diffusing an impurity of a high concentration different from that of substrate.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3255877A JPS53117389A (en) | 1977-03-23 | 1977-03-23 | Semiconductor integrated circuit device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3255877A JPS53117389A (en) | 1977-03-23 | 1977-03-23 | Semiconductor integrated circuit device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS53117389A true JPS53117389A (en) | 1978-10-13 |
Family
ID=12362230
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3255877A Pending JPS53117389A (en) | 1977-03-23 | 1977-03-23 | Semiconductor integrated circuit device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53117389A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5887847A (en) * | 1981-11-20 | 1983-05-25 | Mitsubishi Electric Corp | Semiconductor device |
JPH01189141A (en) * | 1988-01-25 | 1989-07-28 | Nec Corp | Semiconductor device |
-
1977
- 1977-03-23 JP JP3255877A patent/JPS53117389A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5887847A (en) * | 1981-11-20 | 1983-05-25 | Mitsubishi Electric Corp | Semiconductor device |
JPH01189141A (en) * | 1988-01-25 | 1989-07-28 | Nec Corp | Semiconductor device |
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