JPS53112237A - Etching method for metal or meral oxide thin film - Google Patents

Etching method for metal or meral oxide thin film

Info

Publication number
JPS53112237A
JPS53112237A JP16028776A JP16028776A JPS53112237A JP S53112237 A JPS53112237 A JP S53112237A JP 16028776 A JP16028776 A JP 16028776A JP 16028776 A JP16028776 A JP 16028776A JP S53112237 A JPS53112237 A JP S53112237A
Authority
JP
Japan
Prior art keywords
thin film
meral
metal
etching method
oxide thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16028776A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5428383B2 (enrdf_load_html_response
Inventor
Kenji Nakagawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP16028776A priority Critical patent/JPS53112237A/ja
Publication of JPS53112237A publication Critical patent/JPS53112237A/ja
Publication of JPS5428383B2 publication Critical patent/JPS5428383B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • C23F1/10—Etching compositions
    • C23F1/14—Aqueous compositions
    • C23F1/16—Acidic compositions
    • C23F1/26—Acidic compositions for etching refractory metals

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • ing And Chemical Polishing (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
JP16028776A 1976-12-29 1976-12-29 Etching method for metal or meral oxide thin film Granted JPS53112237A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16028776A JPS53112237A (en) 1976-12-29 1976-12-29 Etching method for metal or meral oxide thin film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16028776A JPS53112237A (en) 1976-12-29 1976-12-29 Etching method for metal or meral oxide thin film

Publications (2)

Publication Number Publication Date
JPS53112237A true JPS53112237A (en) 1978-09-30
JPS5428383B2 JPS5428383B2 (enrdf_load_html_response) 1979-09-17

Family

ID=15711713

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16028776A Granted JPS53112237A (en) 1976-12-29 1976-12-29 Etching method for metal or meral oxide thin film

Country Status (1)

Country Link
JP (1) JPS53112237A (enrdf_load_html_response)

Also Published As

Publication number Publication date
JPS5428383B2 (enrdf_load_html_response) 1979-09-17

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