JPS53112073A - Production of semiconductor device - Google Patents
Production of semiconductor deviceInfo
- Publication number
- JPS53112073A JPS53112073A JP2596877A JP2596877A JPS53112073A JP S53112073 A JPS53112073 A JP S53112073A JP 2596877 A JP2596877 A JP 2596877A JP 2596877 A JP2596877 A JP 2596877A JP S53112073 A JPS53112073 A JP S53112073A
- Authority
- JP
- Japan
- Prior art keywords
- production
- semiconductor device
- poly
- impurity
- diffusion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electrodes Of Semiconductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Abstract
PURPOSE: To loser the resistance of poly-Si electrodes and from shallow drain layers by making use of the selective diffusion of an impurity to poly-Si or the outward diffusion of the impurity from the poly-Si.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2596877A JPS53112073A (en) | 1977-03-11 | 1977-03-11 | Production of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2596877A JPS53112073A (en) | 1977-03-11 | 1977-03-11 | Production of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS53112073A true JPS53112073A (en) | 1978-09-30 |
Family
ID=12180517
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2596877A Pending JPS53112073A (en) | 1977-03-11 | 1977-03-11 | Production of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53112073A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6450566A (en) * | 1987-08-21 | 1989-02-27 | Seiko Epson Corp | Mos semiconductor integrated circuit device and manufacture thereof |
-
1977
- 1977-03-11 JP JP2596877A patent/JPS53112073A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6450566A (en) * | 1987-08-21 | 1989-02-27 | Seiko Epson Corp | Mos semiconductor integrated circuit device and manufacture thereof |
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