JPS53112073A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS53112073A
JPS53112073A JP2596877A JP2596877A JPS53112073A JP S53112073 A JPS53112073 A JP S53112073A JP 2596877 A JP2596877 A JP 2596877A JP 2596877 A JP2596877 A JP 2596877A JP S53112073 A JPS53112073 A JP S53112073A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
poly
impurity
diffusion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2596877A
Other languages
Japanese (ja)
Inventor
Mitsumasa Koyanagi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP2596877A priority Critical patent/JPS53112073A/en
Publication of JPS53112073A publication Critical patent/JPS53112073A/en
Pending legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)

Abstract

PURPOSE: To loser the resistance of poly-Si electrodes and from shallow drain layers by making use of the selective diffusion of an impurity to poly-Si or the outward diffusion of the impurity from the poly-Si.
COPYRIGHT: (C)1978,JPO&Japio
JP2596877A 1977-03-11 1977-03-11 Production of semiconductor device Pending JPS53112073A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2596877A JPS53112073A (en) 1977-03-11 1977-03-11 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2596877A JPS53112073A (en) 1977-03-11 1977-03-11 Production of semiconductor device

Publications (1)

Publication Number Publication Date
JPS53112073A true JPS53112073A (en) 1978-09-30

Family

ID=12180517

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2596877A Pending JPS53112073A (en) 1977-03-11 1977-03-11 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS53112073A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6450566A (en) * 1987-08-21 1989-02-27 Seiko Epson Corp Mos semiconductor integrated circuit device and manufacture thereof

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6450566A (en) * 1987-08-21 1989-02-27 Seiko Epson Corp Mos semiconductor integrated circuit device and manufacture thereof

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