JPS5310884B2 - - Google Patents

Info

Publication number
JPS5310884B2
JPS5310884B2 JP12205073A JP12205073A JPS5310884B2 JP S5310884 B2 JPS5310884 B2 JP S5310884B2 JP 12205073 A JP12205073 A JP 12205073A JP 12205073 A JP12205073 A JP 12205073A JP S5310884 B2 JPS5310884 B2 JP S5310884B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP12205073A
Other versions
JPS5072721A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12205073A priority Critical patent/JPS5310884B2/ja
Priority to DE19742449766 priority patent/DE2449766C3/de
Priority to US05/519,256 priority patent/US3984845A/en
Publication of JPS5072721A publication Critical patent/JPS5072721A/ja
Publication of JPS5310884B2 publication Critical patent/JPS5310884B2/ja
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/18—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for optical projection, e.g. combination of mirror and condenser and objective

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Projection-Type Copiers In General (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Projection Apparatus (AREA)
JP12205073A 1973-10-30 1973-10-30 Expired JPS5310884B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP12205073A JPS5310884B2 (ja) 1973-10-30 1973-10-30
DE19742449766 DE2449766C3 (de) 1973-10-30 1974-10-19 Optisches Projektionssystem, insbesondere für einen Lichtzeichner
US05/519,256 US3984845A (en) 1973-10-30 1974-10-30 Projecting optical system for photodrawing machine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12205073A JPS5310884B2 (ja) 1973-10-30 1973-10-30

Publications (2)

Publication Number Publication Date
JPS5072721A JPS5072721A (ja) 1975-06-16
JPS5310884B2 true JPS5310884B2 (ja) 1978-04-18

Family

ID=14826355

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12205073A Expired JPS5310884B2 (ja) 1973-10-30 1973-10-30

Country Status (2)

Country Link
US (1) US3984845A (ja)
JP (1) JPS5310884B2 (ja)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5849298A (ja) * 1981-09-18 1983-03-23 旭光学工業株式会社 フォト自動製図機における自動合焦装置
JP3548277B2 (ja) * 1995-05-17 2004-07-28 ペンタックス株式会社 マルチビーム記録装置およびマルチビーム記録装置の開口板製作方法
US5745296A (en) * 1995-05-17 1998-04-28 Asahi Kogaku Kogyo Kabushiki Kaisha Multibeam recording device
JP3705512B2 (ja) * 1996-05-23 2005-10-12 ペンタックス株式会社 マルチビーム作画装置、ならびにマルチビーム作画装置における光量計測方法および光量補正方法
CN105805577B (zh) * 2016-05-07 2019-04-02 浙江大学 对被照面进行可控间歇均匀照明的照明系统

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH465891A (de) * 1967-08-25 1968-11-30 Conradi G Ag Einrichtung zur automatischen Regulierung der Beleuchtung einer am Arbeitswagen einer automatischen, photoelektrischen Zeichenmaschine angeordneten Lochblende, deren Loch zum Ziehen von Strichen auf eine photographische Schicht abgebildet wird
US3464330A (en) * 1967-11-24 1969-09-02 California Computer Products Optical writing device
DE1761170B1 (de) * 1968-04-10 1971-05-13 Licentia Gmbh Foto-Zeichenkopf mit Symbolen zur Belichtung einer fotoempfindlichen Zeichenunterlage
US3535995A (en) * 1968-06-10 1970-10-27 Us Army Ball shutter
US3610119A (en) * 1969-04-25 1971-10-05 Gerber Scientific Instr Co Photoexposure device

Also Published As

Publication number Publication date
US3984845A (en) 1976-10-05
DE2449766A1 (de) 1975-05-07
DE2449766B2 (de) 1976-07-29
JPS5072721A (ja) 1975-06-16

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