JPS53105377A - Surface processing method for substrate - Google Patents

Surface processing method for substrate

Info

Publication number
JPS53105377A
JPS53105377A JP1932977A JP1932977A JPS53105377A JP S53105377 A JPS53105377 A JP S53105377A JP 1932977 A JP1932977 A JP 1932977A JP 1932977 A JP1932977 A JP 1932977A JP S53105377 A JPS53105377 A JP S53105377A
Authority
JP
Japan
Prior art keywords
substrate
processing method
surface processing
forming
silane compound
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1932977A
Other languages
Japanese (ja)
Inventor
Yoshio Yamashita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP1932977A priority Critical patent/JPS53105377A/en
Publication of JPS53105377A publication Critical patent/JPS53105377A/en
Pending legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Abstract

PURPOSE: To increase the close adhesion only for the radiating domain, by reacting the reaction base of silane compound to the resist, through forming the silane compound film on the substrate and radiation of ionized radiand rays after forming the resist film on it.
COPYRIGHT: (C)1978,JPO&Japio
JP1932977A 1977-02-25 1977-02-25 Surface processing method for substrate Pending JPS53105377A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1932977A JPS53105377A (en) 1977-02-25 1977-02-25 Surface processing method for substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1932977A JPS53105377A (en) 1977-02-25 1977-02-25 Surface processing method for substrate

Publications (1)

Publication Number Publication Date
JPS53105377A true JPS53105377A (en) 1978-09-13

Family

ID=11996360

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1932977A Pending JPS53105377A (en) 1977-02-25 1977-02-25 Surface processing method for substrate

Country Status (1)

Country Link
JP (1) JPS53105377A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5763529A (en) * 1980-08-04 1982-04-17 Hughes Aircraft Co Preholograph element and method of producing hologram
US5314710A (en) * 1991-10-02 1994-05-24 Sony Corporation Insulation layer forming method

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5763529A (en) * 1980-08-04 1982-04-17 Hughes Aircraft Co Preholograph element and method of producing hologram
JPH0248904B2 (en) * 1980-08-04 1990-10-26 Hughes Aircraft Co
US5314710A (en) * 1991-10-02 1994-05-24 Sony Corporation Insulation layer forming method

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