JPS53105377A - Surface processing method for substrate - Google Patents
Surface processing method for substrateInfo
- Publication number
- JPS53105377A JPS53105377A JP1932977A JP1932977A JPS53105377A JP S53105377 A JPS53105377 A JP S53105377A JP 1932977 A JP1932977 A JP 1932977A JP 1932977 A JP1932977 A JP 1932977A JP S53105377 A JPS53105377 A JP S53105377A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- processing method
- surface processing
- forming
- silane compound
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Abstract
PURPOSE: To increase the close adhesion only for the radiating domain, by reacting the reaction base of silane compound to the resist, through forming the silane compound film on the substrate and radiation of ionized radiand rays after forming the resist film on it.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1932977A JPS53105377A (en) | 1977-02-25 | 1977-02-25 | Surface processing method for substrate |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1932977A JPS53105377A (en) | 1977-02-25 | 1977-02-25 | Surface processing method for substrate |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS53105377A true JPS53105377A (en) | 1978-09-13 |
Family
ID=11996360
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1932977A Pending JPS53105377A (en) | 1977-02-25 | 1977-02-25 | Surface processing method for substrate |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53105377A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5763529A (en) * | 1980-08-04 | 1982-04-17 | Hughes Aircraft Co | Preholograph element and method of producing hologram |
US5314710A (en) * | 1991-10-02 | 1994-05-24 | Sony Corporation | Insulation layer forming method |
-
1977
- 1977-02-25 JP JP1932977A patent/JPS53105377A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5763529A (en) * | 1980-08-04 | 1982-04-17 | Hughes Aircraft Co | Preholograph element and method of producing hologram |
JPH0248904B2 (en) * | 1980-08-04 | 1990-10-26 | Hughes Aircraft Co | |
US5314710A (en) * | 1991-10-02 | 1994-05-24 | Sony Corporation | Insulation layer forming method |
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