JPS5298473A - Thin film material - Google Patents
Thin film materialInfo
- Publication number
- JPS5298473A JPS5298473A JP1402776A JP1402776A JPS5298473A JP S5298473 A JPS5298473 A JP S5298473A JP 1402776 A JP1402776 A JP 1402776A JP 1402776 A JP1402776 A JP 1402776A JP S5298473 A JPS5298473 A JP S5298473A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- film material
- content
- relation
- selecting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 title abstract 2
- 239000000463 material Substances 0.000 title 1
- 229910007277 Si3 N4 Inorganic materials 0.000 abstract 1
- 239000010408 film Substances 0.000 abstract 1
- 150000004767 nitrides Chemical class 0.000 abstract 1
- 239000000126 substance Substances 0.000 abstract 1
Landscapes
- Formation Of Insulating Films (AREA)
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1402776A JPS5298473A (en) | 1976-02-13 | 1976-02-13 | Thin film material |
| NLAANVRAGE7613799,A NL171942C (nl) | 1976-02-13 | 1976-12-10 | Werkwijze voor het vervaardigen van een halfgeleiderinrichting, waarbij op een halfgeleiderlichaam een menglaag van nitriden van silicium en germanium wordt aangebracht. |
| US05/756,863 US4126880A (en) | 1976-02-13 | 1977-01-04 | Germanium-containing silicon nitride film |
| DE2705902A DE2705902C3 (de) | 1976-02-13 | 1977-02-11 | Germanium enthaltender Siüciumnitrid-Film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1402776A JPS5298473A (en) | 1976-02-13 | 1976-02-13 | Thin film material |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5298473A true JPS5298473A (en) | 1977-08-18 |
| JPS552731B2 JPS552731B2 (enrdf_load_stackoverflow) | 1980-01-22 |
Family
ID=11849675
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1402776A Granted JPS5298473A (en) | 1976-02-13 | 1976-02-13 | Thin film material |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5298473A (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56175162U (enrdf_load_stackoverflow) * | 1980-05-27 | 1981-12-24 | ||
| JP2006013503A (ja) * | 2004-06-29 | 2006-01-12 | Internatl Business Mach Corp <Ibm> | ドープ窒化膜、ドープ酸化膜、およびその他のドープ膜 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5068085A (enrdf_load_stackoverflow) * | 1973-10-17 | 1975-06-07 |
-
1976
- 1976-02-13 JP JP1402776A patent/JPS5298473A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5068085A (enrdf_load_stackoverflow) * | 1973-10-17 | 1975-06-07 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56175162U (enrdf_load_stackoverflow) * | 1980-05-27 | 1981-12-24 | ||
| JP2006013503A (ja) * | 2004-06-29 | 2006-01-12 | Internatl Business Mach Corp <Ibm> | ドープ窒化膜、ドープ酸化膜、およびその他のドープ膜 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS552731B2 (enrdf_load_stackoverflow) | 1980-01-22 |
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