JPS5297674A - Surface protecting film of electronic parts - Google Patents

Surface protecting film of electronic parts

Info

Publication number
JPS5297674A
JPS5297674A JP1323376A JP1323376A JPS5297674A JP S5297674 A JPS5297674 A JP S5297674A JP 1323376 A JP1323376 A JP 1323376A JP 1323376 A JP1323376 A JP 1323376A JP S5297674 A JPS5297674 A JP S5297674A
Authority
JP
Japan
Prior art keywords
surface protecting
protecting film
electronic parts
film
film formed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1323376A
Other languages
Japanese (ja)
Inventor
Tatsu Ito
Takeo Yoshimi
Katsuo Sugawara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP1323376A priority Critical patent/JPS5297674A/en
Publication of JPS5297674A publication Critical patent/JPS5297674A/en
Pending legal-status Critical Current

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Abstract

PURPOSE: To form a surface protecting film of high reliability by laminating a SiO2 film formed thicker than the Si3N4 film formed by a plasma CVD method, on said Si3N4 film by a sputtering method.
COPYRIGHT: (C)1977,JPO&Japio
JP1323376A 1976-02-12 1976-02-12 Surface protecting film of electronic parts Pending JPS5297674A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1323376A JPS5297674A (en) 1976-02-12 1976-02-12 Surface protecting film of electronic parts

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1323376A JPS5297674A (en) 1976-02-12 1976-02-12 Surface protecting film of electronic parts

Publications (1)

Publication Number Publication Date
JPS5297674A true JPS5297674A (en) 1977-08-16

Family

ID=11827458

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1323376A Pending JPS5297674A (en) 1976-02-12 1976-02-12 Surface protecting film of electronic parts

Country Status (1)

Country Link
JP (1) JPS5297674A (en)

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