JPS5296867A - Semiconductor unit and its manufacture - Google Patents
Semiconductor unit and its manufactureInfo
- Publication number
- JPS5296867A JPS5296867A JP1345076A JP1345076A JPS5296867A JP S5296867 A JPS5296867 A JP S5296867A JP 1345076 A JP1345076 A JP 1345076A JP 1345076 A JP1345076 A JP 1345076A JP S5296867 A JPS5296867 A JP S5296867A
- Authority
- JP
- Japan
- Prior art keywords
- manufacture
- semiconductor unit
- layers
- beam evaporation
- electronic beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H10W72/90—
-
- H10W72/01938—
Landscapes
- Electrodes Of Semiconductors (AREA)
- Wire Bonding (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1345076A JPS5296867A (en) | 1976-02-10 | 1976-02-10 | Semiconductor unit and its manufacture |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1345076A JPS5296867A (en) | 1976-02-10 | 1976-02-10 | Semiconductor unit and its manufacture |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14262579A Division JPS55108733A (en) | 1979-11-01 | 1979-11-01 | Method of manufacture of semiconductor device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5296867A true JPS5296867A (en) | 1977-08-15 |
| JPS5518049B2 JPS5518049B2 (enExample) | 1980-05-16 |
Family
ID=11833465
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1345076A Granted JPS5296867A (en) | 1976-02-10 | 1976-02-10 | Semiconductor unit and its manufacture |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5296867A (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62172032U (enExample) * | 1986-03-25 | 1987-10-31 |
-
1976
- 1976-02-10 JP JP1345076A patent/JPS5296867A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5518049B2 (enExample) | 1980-05-16 |
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