JPS5289485A - Production of insular semiconductor layer - Google Patents

Production of insular semiconductor layer

Info

Publication number
JPS5289485A
JPS5289485A JP547976A JP547976A JPS5289485A JP S5289485 A JPS5289485 A JP S5289485A JP 547976 A JP547976 A JP 547976A JP 547976 A JP547976 A JP 547976A JP S5289485 A JPS5289485 A JP S5289485A
Authority
JP
Japan
Prior art keywords
semiconductor layer
production
insular semiconductor
insular
undercutting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP547976A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5436076B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Yukio Omori
Tadahiro Takigawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP547976A priority Critical patent/JPS5289485A/ja
Publication of JPS5289485A publication Critical patent/JPS5289485A/ja
Publication of JPS5436076B2 publication Critical patent/JPS5436076B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
JP547976A 1976-01-22 1976-01-22 Production of insular semiconductor layer Granted JPS5289485A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP547976A JPS5289485A (en) 1976-01-22 1976-01-22 Production of insular semiconductor layer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP547976A JPS5289485A (en) 1976-01-22 1976-01-22 Production of insular semiconductor layer

Publications (2)

Publication Number Publication Date
JPS5289485A true JPS5289485A (en) 1977-07-27
JPS5436076B2 JPS5436076B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1979-11-07

Family

ID=11612372

Family Applications (1)

Application Number Title Priority Date Filing Date
JP547976A Granted JPS5289485A (en) 1976-01-22 1976-01-22 Production of insular semiconductor layer

Country Status (1)

Country Link
JP (1) JPS5289485A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Also Published As

Publication number Publication date
JPS5436076B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1979-11-07

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