JPS527672A - Gas phase glowing method for semiconductor crystals - Google Patents

Gas phase glowing method for semiconductor crystals

Info

Publication number
JPS527672A
JPS527672A JP8350875A JP8350875A JPS527672A JP S527672 A JPS527672 A JP S527672A JP 8350875 A JP8350875 A JP 8350875A JP 8350875 A JP8350875 A JP 8350875A JP S527672 A JPS527672 A JP S527672A
Authority
JP
Japan
Prior art keywords
gas phase
semiconductor crystals
glowing
glowing method
crystals
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8350875A
Other languages
Japanese (ja)
Inventor
Ryuichi Ueda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP8350875A priority Critical patent/JPS527672A/en
Publication of JPS527672A publication Critical patent/JPS527672A/en
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)

Abstract

PURPOSE: To obtain a high quality single crystal with less dislocations by way of a simple method.
COPYRIGHT: (C)1977,JPO&Japio
JP8350875A 1975-07-09 1975-07-09 Gas phase glowing method for semiconductor crystals Pending JPS527672A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8350875A JPS527672A (en) 1975-07-09 1975-07-09 Gas phase glowing method for semiconductor crystals

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8350875A JPS527672A (en) 1975-07-09 1975-07-09 Gas phase glowing method for semiconductor crystals

Publications (1)

Publication Number Publication Date
JPS527672A true JPS527672A (en) 1977-01-20

Family

ID=13804413

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8350875A Pending JPS527672A (en) 1975-07-09 1975-07-09 Gas phase glowing method for semiconductor crystals

Country Status (1)

Country Link
JP (1) JPS527672A (en)

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