JPS5275266A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS5275266A
JPS5275266A JP15266175A JP15266175A JPS5275266A JP S5275266 A JPS5275266 A JP S5275266A JP 15266175 A JP15266175 A JP 15266175A JP 15266175 A JP15266175 A JP 15266175A JP S5275266 A JPS5275266 A JP S5275266A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
regions
semiconductor substrate
group iii
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15266175A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5758772B2 (cg-RX-API-DMAC10.html
Inventor
Susumu Furuike
Toshio Matsuda
Ginjiro Kanbara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electronics Corp filed Critical Matsushita Electronics Corp
Priority to JP15266175A priority Critical patent/JPS5275266A/ja
Priority to US05/751,124 priority patent/US4102715A/en
Priority to DE2657415A priority patent/DE2657415C2/de
Priority to FR7638415A priority patent/FR2335950A1/fr
Priority to GB53080/76A priority patent/GB1581726A/en
Publication of JPS5275266A publication Critical patent/JPS5275266A/ja
Publication of JPS5758772B2 publication Critical patent/JPS5758772B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Formation Of Insulating Films (AREA)
JP15266175A 1975-12-19 1975-12-19 Production of semiconductor device Granted JPS5275266A (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP15266175A JPS5275266A (en) 1975-12-19 1975-12-19 Production of semiconductor device
US05/751,124 US4102715A (en) 1975-12-19 1976-12-16 Method for diffusing an impurity into a semiconductor body
DE2657415A DE2657415C2 (de) 1975-12-19 1976-12-17 Verfahren zum Eindiffundieren von Fremdstoffen in ein Halbleitersubstrat
FR7638415A FR2335950A1 (fr) 1975-12-19 1976-12-20 Procede pour realiser la diffusion d'une impurete dans un corps semi-conducteur
GB53080/76A GB1581726A (en) 1975-12-19 1976-12-20 Method for diffusing an impurity into a semiconductor body

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15266175A JPS5275266A (en) 1975-12-19 1975-12-19 Production of semiconductor device

Publications (2)

Publication Number Publication Date
JPS5275266A true JPS5275266A (en) 1977-06-24
JPS5758772B2 JPS5758772B2 (cg-RX-API-DMAC10.html) 1982-12-11

Family

ID=15545309

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15266175A Granted JPS5275266A (en) 1975-12-19 1975-12-19 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5275266A (cg-RX-API-DMAC10.html)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50152664A (cg-RX-API-DMAC10.html) * 1974-05-27 1975-12-08

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50152664A (cg-RX-API-DMAC10.html) * 1974-05-27 1975-12-08

Also Published As

Publication number Publication date
JPS5758772B2 (cg-RX-API-DMAC10.html) 1982-12-11

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