JPS5273684A - Semiconductor thin film pressure resistive element - Google Patents

Semiconductor thin film pressure resistive element

Info

Publication number
JPS5273684A
JPS5273684A JP50150300A JP15030075A JPS5273684A JP S5273684 A JPS5273684 A JP S5273684A JP 50150300 A JP50150300 A JP 50150300A JP 15030075 A JP15030075 A JP 15030075A JP S5273684 A JPS5273684 A JP S5273684A
Authority
JP
Japan
Prior art keywords
thin film
semiconductor thin
film pressure
resistive element
pressure resistive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50150300A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5521468B2 (cg-RX-API-DMAC7.html
Inventor
Nobuyoshi Taguchi
Koji Matsuo
Fujio Oda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP50150300A priority Critical patent/JPS5273684A/ja
Publication of JPS5273684A publication Critical patent/JPS5273684A/ja
Publication of JPS5521468B2 publication Critical patent/JPS5521468B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Pressure Sensors (AREA)
JP50150300A 1975-12-16 1975-12-16 Semiconductor thin film pressure resistive element Granted JPS5273684A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50150300A JPS5273684A (en) 1975-12-16 1975-12-16 Semiconductor thin film pressure resistive element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50150300A JPS5273684A (en) 1975-12-16 1975-12-16 Semiconductor thin film pressure resistive element

Publications (2)

Publication Number Publication Date
JPS5273684A true JPS5273684A (en) 1977-06-20
JPS5521468B2 JPS5521468B2 (cg-RX-API-DMAC7.html) 1980-06-10

Family

ID=15493980

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50150300A Granted JPS5273684A (en) 1975-12-16 1975-12-16 Semiconductor thin film pressure resistive element

Country Status (1)

Country Link
JP (1) JPS5273684A (cg-RX-API-DMAC7.html)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4871980A (cg-RX-API-DMAC7.html) * 1971-12-28 1973-09-28

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4871980A (cg-RX-API-DMAC7.html) * 1971-12-28 1973-09-28

Also Published As

Publication number Publication date
JPS5521468B2 (cg-RX-API-DMAC7.html) 1980-06-10

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