JPS5267971A - Manufacture of integrated circuit wafer - Google Patents

Manufacture of integrated circuit wafer

Info

Publication number
JPS5267971A
JPS5267971A JP14473075A JP14473075A JPS5267971A JP S5267971 A JPS5267971 A JP S5267971A JP 14473075 A JP14473075 A JP 14473075A JP 14473075 A JP14473075 A JP 14473075A JP S5267971 A JPS5267971 A JP S5267971A
Authority
JP
Japan
Prior art keywords
manufacture
integrated circuit
circuit wafer
film
oxidization
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14473075A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5751945B2 (2
Inventor
Mikio Kyomasu
Teijiro Otsuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP14473075A priority Critical patent/JPS5267971A/ja
Publication of JPS5267971A publication Critical patent/JPS5267971A/ja
Publication of JPS5751945B2 publication Critical patent/JPS5751945B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Semiconductor Integrated Circuits (AREA)
JP14473075A 1975-12-04 1975-12-04 Manufacture of integrated circuit wafer Granted JPS5267971A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14473075A JPS5267971A (en) 1975-12-04 1975-12-04 Manufacture of integrated circuit wafer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14473075A JPS5267971A (en) 1975-12-04 1975-12-04 Manufacture of integrated circuit wafer

Publications (2)

Publication Number Publication Date
JPS5267971A true JPS5267971A (en) 1977-06-06
JPS5751945B2 JPS5751945B2 (2) 1982-11-05

Family

ID=15368986

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14473075A Granted JPS5267971A (en) 1975-12-04 1975-12-04 Manufacture of integrated circuit wafer

Country Status (1)

Country Link
JP (1) JPS5267971A (2)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2016114377A1 (ja) * 2015-01-16 2017-04-27 雫石　誠 半導体素子とその製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2016114377A1 (ja) * 2015-01-16 2017-04-27 雫石　誠 半導体素子とその製造方法

Also Published As

Publication number Publication date
JPS5751945B2 (2) 1982-11-05

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