JPS526478A - Manufacturing method for semiconductor integrated circuit - Google Patents
Manufacturing method for semiconductor integrated circuitInfo
- Publication number
- JPS526478A JPS526478A JP8326775A JP8326775A JPS526478A JP S526478 A JPS526478 A JP S526478A JP 8326775 A JP8326775 A JP 8326775A JP 8326775 A JP8326775 A JP 8326775A JP S526478 A JPS526478 A JP S526478A
- Authority
- JP
- Japan
- Prior art keywords
- manufacturing
- integrated circuit
- semiconductor integrated
- elements formed
- electric characteristics
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 title abstract 3
- 238000004519 manufacturing process Methods 0.000 title 1
- 238000002347 injection Methods 0.000 abstract 1
- 239000007924 injection Substances 0.000 abstract 1
- 230000003993 interaction Effects 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
- H01L27/08—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind
- H01L27/082—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind including bipolar components only
- H01L27/0823—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind including bipolar components only including vertical bipolar transistors only
- H01L27/0825—Combination of vertical direct transistors of the same conductivity type having different characteristics,(e.g. Darlington transistors)
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Element Separation (AREA)
Abstract
PURPOSE:To have different electric characteristics on one portion of plural semiconductor elements formed on semiconductor substrate and to avoid interaction each other, by use of ion injection application.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8326775A JPS526478A (en) | 1975-07-07 | 1975-07-07 | Manufacturing method for semiconductor integrated circuit |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8326775A JPS526478A (en) | 1975-07-07 | 1975-07-07 | Manufacturing method for semiconductor integrated circuit |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS526478A true JPS526478A (en) | 1977-01-18 |
Family
ID=13797568
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8326775A Pending JPS526478A (en) | 1975-07-07 | 1975-07-07 | Manufacturing method for semiconductor integrated circuit |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS526478A (en) |
-
1975
- 1975-07-07 JP JP8326775A patent/JPS526478A/en active Pending
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