JPS5261970A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS5261970A
JPS5261970A JP50138527A JP13852775A JPS5261970A JP S5261970 A JPS5261970 A JP S5261970A JP 50138527 A JP50138527 A JP 50138527A JP 13852775 A JP13852775 A JP 13852775A JP S5261970 A JPS5261970 A JP S5261970A
Authority
JP
Japan
Prior art keywords
conductivity type
production
semiconductor device
substrate
forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50138527A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5744025B2 (show.php
Inventor
Mari Kato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP50138527A priority Critical patent/JPS5261970A/ja
Publication of JPS5261970A publication Critical patent/JPS5261970A/ja
Publication of JPS5744025B2 publication Critical patent/JPS5744025B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Junction Field-Effect Transistors (AREA)
JP50138527A 1975-11-18 1975-11-18 Production of semiconductor device Granted JPS5261970A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50138527A JPS5261970A (en) 1975-11-18 1975-11-18 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50138527A JPS5261970A (en) 1975-11-18 1975-11-18 Production of semiconductor device

Publications (2)

Publication Number Publication Date
JPS5261970A true JPS5261970A (en) 1977-05-21
JPS5744025B2 JPS5744025B2 (show.php) 1982-09-18

Family

ID=15224226

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50138527A Granted JPS5261970A (en) 1975-11-18 1975-11-18 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5261970A (show.php)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54146583A (en) * 1978-05-09 1979-11-15 Mitsubishi Electric Corp Semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54146583A (en) * 1978-05-09 1979-11-15 Mitsubishi Electric Corp Semiconductor device

Also Published As

Publication number Publication date
JPS5744025B2 (show.php) 1982-09-18

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