JPS5261970A - Production of semiconductor device - Google Patents
Production of semiconductor deviceInfo
- Publication number
- JPS5261970A JPS5261970A JP50138527A JP13852775A JPS5261970A JP S5261970 A JPS5261970 A JP S5261970A JP 50138527 A JP50138527 A JP 50138527A JP 13852775 A JP13852775 A JP 13852775A JP S5261970 A JPS5261970 A JP S5261970A
- Authority
- JP
- Japan
- Prior art keywords
- conductivity type
- production
- semiconductor device
- substrate
- forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Junction Field-Effect Transistors (AREA)
Abstract
PURPOSE: To obtain a J-FET of good pentode and triode characteristics on the same substrate by forming the buried layers of second conductivity type on the required portions of the main surface of a semiconductor substrate of first conductivity type and forming epitaxial layers of second conductivity type and higher resistivity on the substrate.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50138527A JPS5261970A (en) | 1975-11-18 | 1975-11-18 | Production of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50138527A JPS5261970A (en) | 1975-11-18 | 1975-11-18 | Production of semiconductor device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5261970A true JPS5261970A (en) | 1977-05-21 |
JPS5744025B2 JPS5744025B2 (en) | 1982-09-18 |
Family
ID=15224226
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP50138527A Granted JPS5261970A (en) | 1975-11-18 | 1975-11-18 | Production of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5261970A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54146583A (en) * | 1978-05-09 | 1979-11-15 | Mitsubishi Electric Corp | Semiconductor device |
-
1975
- 1975-11-18 JP JP50138527A patent/JPS5261970A/en active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54146583A (en) * | 1978-05-09 | 1979-11-15 | Mitsubishi Electric Corp | Semiconductor device |
Also Published As
Publication number | Publication date |
---|---|
JPS5744025B2 (en) | 1982-09-18 |
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