JPS5261797A - Production of dielectric thin film - Google Patents

Production of dielectric thin film

Info

Publication number
JPS5261797A
JPS5261797A JP50139061A JP13906175A JPS5261797A JP S5261797 A JPS5261797 A JP S5261797A JP 50139061 A JP50139061 A JP 50139061A JP 13906175 A JP13906175 A JP 13906175A JP S5261797 A JPS5261797 A JP S5261797A
Authority
JP
Japan
Prior art keywords
thin film
production
dielectric thin
spattering
adhering
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50139061A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5619935B2 (enrdf_load_html_response
Inventor
Tsuneo Mitsuyu
Kiyotaka Wasa
Shigeru Hayakawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP50139061A priority Critical patent/JPS5261797A/ja
Publication of JPS5261797A publication Critical patent/JPS5261797A/ja
Publication of JPS5619935B2 publication Critical patent/JPS5619935B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Compositions Of Oxide Ceramics (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
  • Inorganic Insulating Materials (AREA)
JP50139061A 1975-11-18 1975-11-18 Production of dielectric thin film Granted JPS5261797A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50139061A JPS5261797A (en) 1975-11-18 1975-11-18 Production of dielectric thin film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50139061A JPS5261797A (en) 1975-11-18 1975-11-18 Production of dielectric thin film

Publications (2)

Publication Number Publication Date
JPS5261797A true JPS5261797A (en) 1977-05-21
JPS5619935B2 JPS5619935B2 (enrdf_load_html_response) 1981-05-11

Family

ID=15236568

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50139061A Granted JPS5261797A (en) 1975-11-18 1975-11-18 Production of dielectric thin film

Country Status (1)

Country Link
JP (1) JPS5261797A (enrdf_load_html_response)

Also Published As

Publication number Publication date
JPS5619935B2 (enrdf_load_html_response) 1981-05-11

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