JPS5259564A - Device for observing micro-patterns - Google Patents

Device for observing micro-patterns

Info

Publication number
JPS5259564A
JPS5259564A JP50135273A JP13527375A JPS5259564A JP S5259564 A JPS5259564 A JP S5259564A JP 50135273 A JP50135273 A JP 50135273A JP 13527375 A JP13527375 A JP 13527375A JP S5259564 A JPS5259564 A JP S5259564A
Authority
JP
Japan
Prior art keywords
patterns
observing micro
sample
observing
micro
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50135273A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5739514B2 (enrdf_load_stackoverflow
Inventor
Tadao Kato
Hiroyasu Toyoda
Kimiko Inaba
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP50135273A priority Critical patent/JPS5259564A/ja
Publication of JPS5259564A publication Critical patent/JPS5259564A/ja
Publication of JPS5739514B2 publication Critical patent/JPS5739514B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Tests Of Electronic Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP50135273A 1975-11-11 1975-11-11 Device for observing micro-patterns Granted JPS5259564A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50135273A JPS5259564A (en) 1975-11-11 1975-11-11 Device for observing micro-patterns

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50135273A JPS5259564A (en) 1975-11-11 1975-11-11 Device for observing micro-patterns

Publications (2)

Publication Number Publication Date
JPS5259564A true JPS5259564A (en) 1977-05-17
JPS5739514B2 JPS5739514B2 (enrdf_load_stackoverflow) 1982-08-21

Family

ID=15147838

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50135273A Granted JPS5259564A (en) 1975-11-11 1975-11-11 Device for observing micro-patterns

Country Status (1)

Country Link
JP (1) JPS5259564A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS5739514B2 (enrdf_load_stackoverflow) 1982-08-21

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