JPS5258895A - Production of dielectric thin film - Google Patents
Production of dielectric thin filmInfo
- Publication number
- JPS5258895A JPS5258895A JP50135774A JP13577475A JPS5258895A JP S5258895 A JPS5258895 A JP S5258895A JP 50135774 A JP50135774 A JP 50135774A JP 13577475 A JP13577475 A JP 13577475A JP S5258895 A JPS5258895 A JP S5258895A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- production
- dielectric thin
- anisotropy
- sputtering
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Compositions Of Oxide Ceramics (AREA)
- Inorganic Compounds Of Heavy Metals (AREA)
- Inorganic Insulating Materials (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
PURPOSE: To produce, by way of sputtering, a dielectric amorphous thin film consisting of bismuth oxides containing lead oxides which has various utilities such as capability of forming on an optional substrate delay lines for surface elastic waves having a long delay time and with on anisotropy in propagation speed.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50135774A JPS5258895A (en) | 1975-11-11 | 1975-11-11 | Production of dielectric thin film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50135774A JPS5258895A (en) | 1975-11-11 | 1975-11-11 | Production of dielectric thin film |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5258895A true JPS5258895A (en) | 1977-05-14 |
JPS5619923B2 JPS5619923B2 (en) | 1981-05-11 |
Family
ID=15159533
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP50135774A Granted JPS5258895A (en) | 1975-11-11 | 1975-11-11 | Production of dielectric thin film |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5258895A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4792463A (en) * | 1985-09-17 | 1988-12-20 | Masaru Okada | Method of producing ferroelectric thin film |
-
1975
- 1975-11-11 JP JP50135774A patent/JPS5258895A/en active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4792463A (en) * | 1985-09-17 | 1988-12-20 | Masaru Okada | Method of producing ferroelectric thin film |
Also Published As
Publication number | Publication date |
---|---|
JPS5619923B2 (en) | 1981-05-11 |
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