JPS5250689A - Checking device for defect of directional pattern - Google Patents
Checking device for defect of directional patternInfo
- Publication number
- JPS5250689A JPS5250689A JP50127027A JP12702775A JPS5250689A JP S5250689 A JPS5250689 A JP S5250689A JP 50127027 A JP50127027 A JP 50127027A JP 12702775 A JP12702775 A JP 12702775A JP S5250689 A JPS5250689 A JP S5250689A
- Authority
- JP
- Japan
- Prior art keywords
- defect
- checking device
- directional pattern
- unit surface
- defective unit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50127027A JPS5250689A (en) | 1975-10-22 | 1975-10-22 | Checking device for defect of directional pattern |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50127027A JPS5250689A (en) | 1975-10-22 | 1975-10-22 | Checking device for defect of directional pattern |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5250689A true JPS5250689A (en) | 1977-04-22 |
JPS5324781B2 JPS5324781B2 (sl) | 1978-07-22 |
Family
ID=14949853
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP50127027A Granted JPS5250689A (en) | 1975-10-22 | 1975-10-22 | Checking device for defect of directional pattern |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5250689A (sl) |
-
1975
- 1975-10-22 JP JP50127027A patent/JPS5250689A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS5324781B2 (sl) | 1978-07-22 |
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