JPS5250689A - Checking device for defect of directional pattern - Google Patents

Checking device for defect of directional pattern

Info

Publication number
JPS5250689A
JPS5250689A JP50127027A JP12702775A JPS5250689A JP S5250689 A JPS5250689 A JP S5250689A JP 50127027 A JP50127027 A JP 50127027A JP 12702775 A JP12702775 A JP 12702775A JP S5250689 A JPS5250689 A JP S5250689A
Authority
JP
Japan
Prior art keywords
defect
checking device
directional pattern
unit surface
defective unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50127027A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5324781B2 (sl
Inventor
Masakata Minami
Hidekazu Sekizawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP50127027A priority Critical patent/JPS5250689A/ja
Publication of JPS5250689A publication Critical patent/JPS5250689A/ja
Publication of JPS5324781B2 publication Critical patent/JPS5324781B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP50127027A 1975-10-22 1975-10-22 Checking device for defect of directional pattern Granted JPS5250689A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50127027A JPS5250689A (en) 1975-10-22 1975-10-22 Checking device for defect of directional pattern

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50127027A JPS5250689A (en) 1975-10-22 1975-10-22 Checking device for defect of directional pattern

Publications (2)

Publication Number Publication Date
JPS5250689A true JPS5250689A (en) 1977-04-22
JPS5324781B2 JPS5324781B2 (sl) 1978-07-22

Family

ID=14949853

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50127027A Granted JPS5250689A (en) 1975-10-22 1975-10-22 Checking device for defect of directional pattern

Country Status (1)

Country Link
JP (1) JPS5250689A (sl)

Also Published As

Publication number Publication date
JPS5324781B2 (sl) 1978-07-22

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