JPS5250689A - Checking device for defect of directional pattern - Google Patents
Checking device for defect of directional patternInfo
- Publication number
- JPS5250689A JPS5250689A JP50127027A JP12702775A JPS5250689A JP S5250689 A JPS5250689 A JP S5250689A JP 50127027 A JP50127027 A JP 50127027A JP 12702775 A JP12702775 A JP 12702775A JP S5250689 A JPS5250689 A JP S5250689A
- Authority
- JP
- Japan
- Prior art keywords
- defect
- checking device
- directional pattern
- unit surface
- defective unit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
PURPOSE: To check defect of each unit surface of the pattern to be tested and lead the address of defective unit surface in the memory, and at the next stage, to perform the check of defective unit surface by reading the address of the defective unit.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50127027A JPS5250689A (en) | 1975-10-22 | 1975-10-22 | Checking device for defect of directional pattern |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50127027A JPS5250689A (en) | 1975-10-22 | 1975-10-22 | Checking device for defect of directional pattern |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5250689A true JPS5250689A (en) | 1977-04-22 |
JPS5324781B2 JPS5324781B2 (en) | 1978-07-22 |
Family
ID=14949853
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP50127027A Granted JPS5250689A (en) | 1975-10-22 | 1975-10-22 | Checking device for defect of directional pattern |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5250689A (en) |
-
1975
- 1975-10-22 JP JP50127027A patent/JPS5250689A/en active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS5324781B2 (en) | 1978-07-22 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
SE428837B (en) | APPLICATION MODULE FOR USE IN PARTICLE TESTING DEVICES | |
JPS5233575A (en) | Differential pressure measuring device | |
JPS5250689A (en) | Checking device for defect of directional pattern | |
JPS5356942A (en) | Inspection accounting unit of cash register | |
JPS526436A (en) | Electronic circuit test system | |
JPS51147260A (en) | Inspecting method of resist pattern | |
JPS5210032A (en) | Construction method of semiconductor memory unit | |
JPS534412A (en) | Test method for subscribing lines | |
JPS5362953A (en) | Test method for logical device | |
JPS51137334A (en) | An electronic computer | |
JPS51118932A (en) | Write-modify method of program and the device | |
JPS5232676A (en) | Pattern check system | |
JPS51146129A (en) | Memory device | |
JPS5338266A (en) | Screening method of semiconductors and device for the same | |
JPS5222479A (en) | Method of inspecting masks | |
JPS5369546A (en) | Method and apparatus for memory unit test | |
JPS5245234A (en) | Device for testing circuit | |
JPS51147222A (en) | Magnetic-valve memory device | |
JPS5266339A (en) | Display of memory test results | |
JPS51138357A (en) | Automatic checking apparatus for logic circuits | |
JPS51126736A (en) | Defective information processing method and device therefore. | |
JPS51120746A (en) | Device for inspecting twists in roof tiles | |
JPS5219079A (en) | Ic tester | |
JPS51147921A (en) | Memory device | |
JPS5379329A (en) | Test method of memory circuit |