JPS5249770A - Pattern inspection device - Google Patents

Pattern inspection device

Info

Publication number
JPS5249770A
JPS5249770A JP12541475A JP12541475A JPS5249770A JP S5249770 A JPS5249770 A JP S5249770A JP 12541475 A JP12541475 A JP 12541475A JP 12541475 A JP12541475 A JP 12541475A JP S5249770 A JPS5249770 A JP S5249770A
Authority
JP
Japan
Prior art keywords
inspection device
pattern inspection
subsquently
feed
image
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12541475A
Other languages
English (en)
Japanese (ja)
Other versions
JPS542543B2 (cg-RX-API-DMAC7.html
Inventor
Masakata Minami
Hidekazu Sekizawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP12541475A priority Critical patent/JPS5249770A/ja
Publication of JPS5249770A publication Critical patent/JPS5249770A/ja
Publication of JPS542543B2 publication Critical patent/JPS542543B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP12541475A 1975-10-20 1975-10-20 Pattern inspection device Granted JPS5249770A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12541475A JPS5249770A (en) 1975-10-20 1975-10-20 Pattern inspection device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12541475A JPS5249770A (en) 1975-10-20 1975-10-20 Pattern inspection device

Publications (2)

Publication Number Publication Date
JPS5249770A true JPS5249770A (en) 1977-04-21
JPS542543B2 JPS542543B2 (cg-RX-API-DMAC7.html) 1979-02-08

Family

ID=14909505

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12541475A Granted JPS5249770A (en) 1975-10-20 1975-10-20 Pattern inspection device

Country Status (1)

Country Link
JP (1) JPS5249770A (cg-RX-API-DMAC7.html)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54113262A (en) * 1978-02-24 1979-09-04 Hitachi Ltd Mask inspection unit
JPS6177334A (ja) * 1984-09-21 1986-04-19 Fujitsu Ltd 電子ビ−ム装置
WO1997038283A1 (fr) * 1996-04-05 1997-10-16 Komatsu Ltd. Instrument de mesure optique
JP2007086066A (ja) * 2005-09-19 2007-04-05 Fei Co ツール構成要素の動作領域を所定の要素に調節する方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49135581A (cg-RX-API-DMAC7.html) * 1973-04-28 1974-12-27
JPS5093772A (cg-RX-API-DMAC7.html) * 1973-12-21 1975-07-26
JPS5143958A (en) * 1974-10-12 1976-04-15 Nippon Jido Seigyo Kk Pataanno ketsukankensahoho

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49135581A (cg-RX-API-DMAC7.html) * 1973-04-28 1974-12-27
JPS5093772A (cg-RX-API-DMAC7.html) * 1973-12-21 1975-07-26
JPS5143958A (en) * 1974-10-12 1976-04-15 Nippon Jido Seigyo Kk Pataanno ketsukankensahoho

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54113262A (en) * 1978-02-24 1979-09-04 Hitachi Ltd Mask inspection unit
JPS6177334A (ja) * 1984-09-21 1986-04-19 Fujitsu Ltd 電子ビ−ム装置
WO1997038283A1 (fr) * 1996-04-05 1997-10-16 Komatsu Ltd. Instrument de mesure optique
JP2007086066A (ja) * 2005-09-19 2007-04-05 Fei Co ツール構成要素の動作領域を所定の要素に調節する方法

Also Published As

Publication number Publication date
JPS542543B2 (cg-RX-API-DMAC7.html) 1979-02-08

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