JPS5242368A - Process for production of semiconductor device - Google Patents

Process for production of semiconductor device

Info

Publication number
JPS5242368A
JPS5242368A JP11853375A JP11853375A JPS5242368A JP S5242368 A JPS5242368 A JP S5242368A JP 11853375 A JP11853375 A JP 11853375A JP 11853375 A JP11853375 A JP 11853375A JP S5242368 A JPS5242368 A JP S5242368A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
edge
make
injection layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11853375A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5550381B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Hiroshi Nishi
Teruo Sakurai
Shigeo Osaka
Tsugio Kumai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP11853375A priority Critical patent/JPS5242368A/ja
Publication of JPS5242368A publication Critical patent/JPS5242368A/ja
Publication of JPS5550381B2 publication Critical patent/JPS5550381B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
JP11853375A 1975-09-30 1975-09-30 Process for production of semiconductor device Granted JPS5242368A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11853375A JPS5242368A (en) 1975-09-30 1975-09-30 Process for production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11853375A JPS5242368A (en) 1975-09-30 1975-09-30 Process for production of semiconductor device

Publications (2)

Publication Number Publication Date
JPS5242368A true JPS5242368A (en) 1977-04-01
JPS5550381B2 JPS5550381B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1980-12-17

Family

ID=14738939

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11853375A Granted JPS5242368A (en) 1975-09-30 1975-09-30 Process for production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5242368A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52106682A (en) * 1976-03-05 1977-09-07 Nippon Telegr & Teleph Corp <Ntt> Preparation of semiconductor

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51102551A (en) * 1975-03-07 1976-09-10 Sharp Kk Handotaiheno ionsentakuchunyuho

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51102551A (en) * 1975-03-07 1976-09-10 Sharp Kk Handotaiheno ionsentakuchunyuho

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52106682A (en) * 1976-03-05 1977-09-07 Nippon Telegr & Teleph Corp <Ntt> Preparation of semiconductor

Also Published As

Publication number Publication date
JPS5550381B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1980-12-17

Similar Documents

Publication Publication Date Title
JPS51123561A (en) Production method of semicondvctor device
JPS5224478A (en) Semiconductor device manufacturing process
JPS5211525A (en) Method of manufacturing headrests
JPS5248468A (en) Process for production of semiconductor device
JPS5242368A (en) Process for production of semiconductor device
JPS5244569A (en) Process for production of semiconductor element
JPS5279664A (en) Forming method for electrodes of semiconductor devices
JPS51118391A (en) Manufacturing process for semiconducter unit
JPS51151073A (en) Method to adjust the position of an mask for an integrated circuit
JPS5279654A (en) Production of semiconductor device
JPS51123582A (en) Semiconductor device production system
JPS5267271A (en) Formation of through-hole onto semiconductor substrate
JPS5219081A (en) Production method of semiconductor device
JPS525700A (en) The process for production of silicon nitride
JPS5240061A (en) Semiconductor device and process for production of same
JPS51125356A (en) Process for preparing 4-hydroxycyclopent -2-ene-1-one
JPS5240078A (en) Process for production of semiconductor device
JPS5249781A (en) Process for production of semiconductor device
JPS51143589A (en) A process and the apparatus for poly- olefine form
JPS5242375A (en) Process for production of semiconductor device
JPS51131277A (en) Semi-conductor unit manufacturing process
JPS5248975A (en) Process for production of fine opening
JPS5294070A (en) Process for preparing semi-conductor
JPS5236975A (en) Process for production of semiconductor device
JPS51113469A (en) Manufacturing method of semiconductor device