JPS5235596B2 - - Google Patents

Info

Publication number
JPS5235596B2
JPS5235596B2 JP2118173A JP2118173A JPS5235596B2 JP S5235596 B2 JPS5235596 B2 JP S5235596B2 JP 2118173 A JP2118173 A JP 2118173A JP 2118173 A JP2118173 A JP 2118173A JP S5235596 B2 JPS5235596 B2 JP S5235596B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP2118173A
Other languages
Japanese (ja)
Other versions
JPS49111585A (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2118173A priority Critical patent/JPS5235596B2/ja
Publication of JPS49111585A publication Critical patent/JPS49111585A/ja
Publication of JPS5235596B2 publication Critical patent/JPS5235596B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Formation Of Insulating Films (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
  • Manufacturing Of Printed Wiring (AREA)
  • Drying Of Semiconductors (AREA)
JP2118173A 1973-02-23 1973-02-23 Expired JPS5235596B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2118173A JPS5235596B2 (enrdf_load_stackoverflow) 1973-02-23 1973-02-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2118173A JPS5235596B2 (enrdf_load_stackoverflow) 1973-02-23 1973-02-23

Publications (2)

Publication Number Publication Date
JPS49111585A JPS49111585A (enrdf_load_stackoverflow) 1974-10-24
JPS5235596B2 true JPS5235596B2 (enrdf_load_stackoverflow) 1977-09-09

Family

ID=12047752

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2118173A Expired JPS5235596B2 (enrdf_load_stackoverflow) 1973-02-23 1973-02-23

Country Status (1)

Country Link
JP (1) JPS5235596B2 (enrdf_load_stackoverflow)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5943815B2 (ja) * 1975-10-07 1984-10-24 富士通株式会社 エピタキシヤル成長法
JPS5272172A (en) * 1975-12-12 1977-06-16 Mitsubishi Electric Corp Formation of insulator film on semiconductor crystal
JPS5438770A (en) * 1977-09-01 1979-03-23 Mitsubishi Electric Corp Etching device
JPS5565428A (en) * 1978-11-10 1980-05-16 Tdk Corp Direct formation of thin film pattern
JPS56142630A (en) * 1980-04-09 1981-11-07 Fujitsu Ltd Manufacture of semiconductor device
US4281030A (en) * 1980-05-12 1981-07-28 Bell Telephone Laboratories, Incorporated Implantation of vaporized material on melted substrates
JPS5892216A (ja) * 1981-11-27 1983-06-01 Mitsubishi Electric Corp 半導体装置の製造方法
JPS58132925A (ja) * 1982-02-02 1983-08-08 Agency Of Ind Science & Technol パタ−ン投影によるデバイス製作法
JPS59140369A (ja) * 1983-12-27 1984-08-11 Agency Of Ind Science & Technol 薄膜製造方法とその装置
JPS61119042A (ja) * 1984-11-15 1986-06-06 Toshiba Corp 半導体基板中の不純物を分析する為の試料を作成する装置
JPS61224387A (ja) * 1985-03-28 1986-10-06 Rikagaku Kenkyusho 半導体装置

Also Published As

Publication number Publication date
JPS49111585A (enrdf_load_stackoverflow) 1974-10-24

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