JPS5231663A - Formation method of multicrystal silicon base plate - Google Patents

Formation method of multicrystal silicon base plate

Info

Publication number
JPS5231663A
JPS5231663A JP10697175A JP10697175A JPS5231663A JP S5231663 A JPS5231663 A JP S5231663A JP 10697175 A JP10697175 A JP 10697175A JP 10697175 A JP10697175 A JP 10697175A JP S5231663 A JPS5231663 A JP S5231663A
Authority
JP
Japan
Prior art keywords
base plate
formation method
silicon base
multicrystal silicon
multicrystal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10697175A
Other languages
English (en)
Inventor
Sadao Yasuda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP10697175A priority Critical patent/JPS5231663A/ja
Publication of JPS5231663A publication Critical patent/JPS5231663A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Element Separation (AREA)
JP10697175A 1975-09-05 1975-09-05 Formation method of multicrystal silicon base plate Pending JPS5231663A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10697175A JPS5231663A (en) 1975-09-05 1975-09-05 Formation method of multicrystal silicon base plate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10697175A JPS5231663A (en) 1975-09-05 1975-09-05 Formation method of multicrystal silicon base plate

Publications (1)

Publication Number Publication Date
JPS5231663A true JPS5231663A (en) 1977-03-10

Family

ID=14447178

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10697175A Pending JPS5231663A (en) 1975-09-05 1975-09-05 Formation method of multicrystal silicon base plate

Country Status (1)

Country Link
JP (1) JPS5231663A (ja)

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