JPS5226287A - Sample analyzing apparatus by detection of secondary electrons - Google Patents
Sample analyzing apparatus by detection of secondary electronsInfo
- Publication number
- JPS5226287A JPS5226287A JP50102457A JP10245775A JPS5226287A JP S5226287 A JPS5226287 A JP S5226287A JP 50102457 A JP50102457 A JP 50102457A JP 10245775 A JP10245775 A JP 10245775A JP S5226287 A JPS5226287 A JP S5226287A
- Authority
- JP
- Japan
- Prior art keywords
- analyzing apparatus
- detection
- secondary electrons
- sample
- sample analyzing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50102457A JPS5226287A (en) | 1975-08-23 | 1975-08-23 | Sample analyzing apparatus by detection of secondary electrons |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50102457A JPS5226287A (en) | 1975-08-23 | 1975-08-23 | Sample analyzing apparatus by detection of secondary electrons |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5226287A true JPS5226287A (en) | 1977-02-26 |
JPS567259B2 JPS567259B2 (ja) | 1981-02-17 |
Family
ID=14327984
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP50102457A Granted JPS5226287A (en) | 1975-08-23 | 1975-08-23 | Sample analyzing apparatus by detection of secondary electrons |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5226287A (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6123258U (ja) * | 1984-07-18 | 1986-02-12 | 東芝ライテック株式会社 | ハロゲン電球 |
JPS63155253U (ja) * | 1987-03-31 | 1988-10-12 | ||
JPS63155252U (ja) * | 1987-03-31 | 1988-10-12 |
-
1975
- 1975-08-23 JP JP50102457A patent/JPS5226287A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS567259B2 (ja) | 1981-02-17 |
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