JPS567259B2 - - Google Patents

Info

Publication number
JPS567259B2
JPS567259B2 JP10245775A JP10245775A JPS567259B2 JP S567259 B2 JPS567259 B2 JP S567259B2 JP 10245775 A JP10245775 A JP 10245775A JP 10245775 A JP10245775 A JP 10245775A JP S567259 B2 JPS567259 B2 JP S567259B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP10245775A
Other versions
JPS5226287A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP50102457A priority Critical patent/JPS5226287A/ja
Publication of JPS5226287A publication Critical patent/JPS5226287A/ja
Publication of JPS567259B2 publication Critical patent/JPS567259B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP50102457A 1975-08-23 1975-08-23 Sample analyzing apparatus by detection of secondary electrons Granted JPS5226287A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50102457A JPS5226287A (en) 1975-08-23 1975-08-23 Sample analyzing apparatus by detection of secondary electrons

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50102457A JPS5226287A (en) 1975-08-23 1975-08-23 Sample analyzing apparatus by detection of secondary electrons

Publications (2)

Publication Number Publication Date
JPS5226287A JPS5226287A (en) 1977-02-26
JPS567259B2 true JPS567259B2 (ja) 1981-02-17

Family

ID=14327984

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50102457A Granted JPS5226287A (en) 1975-08-23 1975-08-23 Sample analyzing apparatus by detection of secondary electrons

Country Status (1)

Country Link
JP (1) JPS5226287A (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63155253U (ja) * 1987-03-31 1988-10-12
JPS63155252U (ja) * 1987-03-31 1988-10-12
JPH0338940Y2 (ja) * 1984-07-18 1991-08-16

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0338940Y2 (ja) * 1984-07-18 1991-08-16
JPS63155253U (ja) * 1987-03-31 1988-10-12
JPS63155252U (ja) * 1987-03-31 1988-10-12

Also Published As

Publication number Publication date
JPS5226287A (en) 1977-02-26

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