JPS5224554A - Surface inspection device - Google Patents

Surface inspection device

Info

Publication number
JPS5224554A
JPS5224554A JP10019875A JP10019875A JPS5224554A JP S5224554 A JPS5224554 A JP S5224554A JP 10019875 A JP10019875 A JP 10019875A JP 10019875 A JP10019875 A JP 10019875A JP S5224554 A JPS5224554 A JP S5224554A
Authority
JP
Japan
Prior art keywords
inspection device
surface inspection
curved surface
stains
inspected
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10019875A
Other languages
English (en)
Other versions
JPS5616903B2 (ja
Inventor
Yoshio Matsumoto
Tomohiro Kuni
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP10019875A priority Critical patent/JPS5224554A/ja
Publication of JPS5224554A publication Critical patent/JPS5224554A/ja
Publication of JPS5616903B2 publication Critical patent/JPS5616903B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP10019875A 1975-08-20 1975-08-20 Surface inspection device Granted JPS5224554A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10019875A JPS5224554A (en) 1975-08-20 1975-08-20 Surface inspection device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10019875A JPS5224554A (en) 1975-08-20 1975-08-20 Surface inspection device

Publications (2)

Publication Number Publication Date
JPS5224554A true JPS5224554A (en) 1977-02-24
JPS5616903B2 JPS5616903B2 (ja) 1981-04-18

Family

ID=14267592

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10019875A Granted JPS5224554A (en) 1975-08-20 1975-08-20 Surface inspection device

Country Status (1)

Country Link
JP (1) JPS5224554A (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5759153A (en) * 1980-09-25 1982-04-09 Hitachi Zosen Corp Detector for surface characteristic
US4448527A (en) * 1982-02-08 1984-05-15 Centro Ricerche Fiat S.P.A. Method and apparatus for detecting surface defects in mechanical workpieces
JPS6156945A (ja) * 1984-08-28 1986-03-22 Yamada Seisakusho:Kk 円筒面における孔未加工品の検査方法及びその装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60179027U (ja) * 1984-05-08 1985-11-28 愛知電機株式会社 モ−ルド変圧器の充電部保護装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4953491A (ja) * 1972-06-29 1974-05-24

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4953491A (ja) * 1972-06-29 1974-05-24

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5759153A (en) * 1980-09-25 1982-04-09 Hitachi Zosen Corp Detector for surface characteristic
US4448527A (en) * 1982-02-08 1984-05-15 Centro Ricerche Fiat S.P.A. Method and apparatus for detecting surface defects in mechanical workpieces
JPS6156945A (ja) * 1984-08-28 1986-03-22 Yamada Seisakusho:Kk 円筒面における孔未加工品の検査方法及びその装置

Also Published As

Publication number Publication date
JPS5616903B2 (ja) 1981-04-18

Similar Documents

Publication Publication Date Title
JPS55125439A (en) Defect inspection device
JPS5224554A (en) Surface inspection device
JPS5355983A (en) Automatic micro defect detector
JPS5389794A (en) Defect inspecting apparatus
JPS5365777A (en) Surface defect detector
JPS5235691A (en) Surface inspection apparatus for cylindrical pellets
JPS51131001A (en) Function inspection system
JPS5764153A (en) Bottle inspecting device
JPS5233585A (en) Device for controlling contact pressure of probe for ultrasonic flaw de tectors
JPS545785A (en) Non-destructive inspecting apparatus
JPS56150827A (en) Inspection device for abnormality of mask
JPS5238992A (en) Continous flaw identification method for steel products
JPS51150384A (en) Supersonic wave flaw detecting method for steel pipe
JPS545750A (en) Pattern inspecting method
JPS538061A (en) Automatic positioning apparatus of articles
JPS5224553A (en) Surface inspection device
JPS52139485A (en) Follow-up apparatus for use in high-speed ultrasonic flaw detection
JPS5357087A (en) Flaw detecting system
JPS5279877A (en) Mask inspection device
JPS5262448A (en) Lens surface monitoring device of photoelectric instrument
JPS51147378A (en) Flaw detecting method of steel pieces
JPS5382492A (en) Surface inspecting method
JPS5398871A (en) Shape inspecting apparatus
JPS51138467A (en) Method of detecting surface configuration of luminous member by contour line fringe and fabrication thereof
JPS5232275A (en) Wafer inspector