JPS5279877A - Mask inspection device - Google Patents

Mask inspection device

Info

Publication number
JPS5279877A
JPS5279877A JP15864775A JP15864775A JPS5279877A JP S5279877 A JPS5279877 A JP S5279877A JP 15864775 A JP15864775 A JP 15864775A JP 15864775 A JP15864775 A JP 15864775A JP S5279877 A JPS5279877 A JP S5279877A
Authority
JP
Japan
Prior art keywords
inspection device
mask inspection
defects
mask
defect
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15864775A
Other languages
Japanese (ja)
Other versions
JPS6044824B2 (en
Inventor
Noriyuki Goto
Takashi Kondo
Kimihisa Ichikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP50158647A priority Critical patent/JPS6044824B2/en
Publication of JPS5279877A publication Critical patent/JPS5279877A/en
Publication of JPS6044824B2 publication Critical patent/JPS6044824B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

PURPOSE: To accurately identify the position of defects and make possible rapid correction operation for said defects by automatically detecting the presence or absence of defects in a mask and indicating the defect position on the actual mask if there is any defect.
COPYRIGHT: (C)1977,JPO&Japio
JP50158647A 1975-12-26 1975-12-26 mask correction device Expired JPS6044824B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50158647A JPS6044824B2 (en) 1975-12-26 1975-12-26 mask correction device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50158647A JPS6044824B2 (en) 1975-12-26 1975-12-26 mask correction device

Publications (2)

Publication Number Publication Date
JPS5279877A true JPS5279877A (en) 1977-07-05
JPS6044824B2 JPS6044824B2 (en) 1985-10-05

Family

ID=15676269

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50158647A Expired JPS6044824B2 (en) 1975-12-26 1975-12-26 mask correction device

Country Status (1)

Country Link
JP (1) JPS6044824B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0247540A (en) * 1988-08-10 1990-02-16 Toshiba Mach Co Ltd Inspecting apparatus of mask

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4979178A (en) * 1972-12-04 1974-07-31

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4979178A (en) * 1972-12-04 1974-07-31

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0247540A (en) * 1988-08-10 1990-02-16 Toshiba Mach Co Ltd Inspecting apparatus of mask

Also Published As

Publication number Publication date
JPS6044824B2 (en) 1985-10-05

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