JPS522381A - Electronics beam deflection scanning method - Google Patents

Electronics beam deflection scanning method

Info

Publication number
JPS522381A
JPS522381A JP50077987A JP7798775A JPS522381A JP S522381 A JPS522381 A JP S522381A JP 50077987 A JP50077987 A JP 50077987A JP 7798775 A JP7798775 A JP 7798775A JP S522381 A JPS522381 A JP S522381A
Authority
JP
Japan
Prior art keywords
scanning method
beam deflection
deflection scanning
electronics beam
electronics
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50077987A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5530651B2 (index.php
Inventor
Takashi Soma
Masanori Idesawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RIKEN
Original Assignee
RIKEN
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by RIKEN filed Critical RIKEN
Priority to JP50077987A priority Critical patent/JPS522381A/ja
Publication of JPS522381A publication Critical patent/JPS522381A/ja
Publication of JPS5530651B2 publication Critical patent/JPS5530651B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
JP50077987A 1975-06-24 1975-06-24 Electronics beam deflection scanning method Granted JPS522381A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50077987A JPS522381A (en) 1975-06-24 1975-06-24 Electronics beam deflection scanning method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50077987A JPS522381A (en) 1975-06-24 1975-06-24 Electronics beam deflection scanning method

Publications (2)

Publication Number Publication Date
JPS522381A true JPS522381A (en) 1977-01-10
JPS5530651B2 JPS5530651B2 (index.php) 1980-08-12

Family

ID=13649192

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50077987A Granted JPS522381A (en) 1975-06-24 1975-06-24 Electronics beam deflection scanning method

Country Status (1)

Country Link
JP (1) JPS522381A (index.php)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5435173U (index.php) * 1977-08-12 1979-03-07
JPS54130448A (en) * 1978-03-31 1979-10-09 Umebachi Fuasunaa Kk Method and apparatus for phosphate treatment of eleongated material

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5435173U (index.php) * 1977-08-12 1979-03-07
JPS54130448A (en) * 1978-03-31 1979-10-09 Umebachi Fuasunaa Kk Method and apparatus for phosphate treatment of eleongated material

Also Published As

Publication number Publication date
JPS5530651B2 (index.php) 1980-08-12

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