JPS5220763A - Impurity diffusion system - Google Patents

Impurity diffusion system

Info

Publication number
JPS5220763A
JPS5220763A JP50096944A JP9694475A JPS5220763A JP S5220763 A JPS5220763 A JP S5220763A JP 50096944 A JP50096944 A JP 50096944A JP 9694475 A JP9694475 A JP 9694475A JP S5220763 A JPS5220763 A JP S5220763A
Authority
JP
Japan
Prior art keywords
diffusion
impurity diffusion
diffusion system
shallow
chlorine
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50096944A
Other languages
English (en)
Japanese (ja)
Other versions
JPS544827B2 (cg-RX-API-DMAC7.html
Inventor
Tadashi Uno
Yasumasa Nabeta
Shuji Kubo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP50096944A priority Critical patent/JPS5220763A/ja
Publication of JPS5220763A publication Critical patent/JPS5220763A/ja
Publication of JPS544827B2 publication Critical patent/JPS544827B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP50096944A 1975-08-08 1975-08-08 Impurity diffusion system Granted JPS5220763A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50096944A JPS5220763A (en) 1975-08-08 1975-08-08 Impurity diffusion system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50096944A JPS5220763A (en) 1975-08-08 1975-08-08 Impurity diffusion system

Publications (2)

Publication Number Publication Date
JPS5220763A true JPS5220763A (en) 1977-02-16
JPS544827B2 JPS544827B2 (cg-RX-API-DMAC7.html) 1979-03-10

Family

ID=14178414

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50096944A Granted JPS5220763A (en) 1975-08-08 1975-08-08 Impurity diffusion system

Country Status (1)

Country Link
JP (1) JPS5220763A (cg-RX-API-DMAC7.html)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5057776A (cg-RX-API-DMAC7.html) * 1973-09-17 1975-05-20

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5057776A (cg-RX-API-DMAC7.html) * 1973-09-17 1975-05-20

Also Published As

Publication number Publication date
JPS544827B2 (cg-RX-API-DMAC7.html) 1979-03-10

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