JPS52156781A - Growth of crystal with molecular beam - Google Patents
Growth of crystal with molecular beamInfo
- Publication number
- JPS52156781A JPS52156781A JP7479876A JP7479876A JPS52156781A JP S52156781 A JPS52156781 A JP S52156781A JP 7479876 A JP7479876 A JP 7479876A JP 7479876 A JP7479876 A JP 7479876A JP S52156781 A JPS52156781 A JP S52156781A
- Authority
- JP
- Japan
- Prior art keywords
- crystal
- molecular beam
- growth
- collide
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Abstract
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7479876A JPS589795B2 (en) | 1976-06-23 | 1976-06-23 | Molecular beam crystal growth method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7479876A JPS589795B2 (en) | 1976-06-23 | 1976-06-23 | Molecular beam crystal growth method |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS52156781A true JPS52156781A (en) | 1977-12-27 |
JPS589795B2 JPS589795B2 (en) | 1983-02-22 |
Family
ID=13557674
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7479876A Expired JPS589795B2 (en) | 1976-06-23 | 1976-06-23 | Molecular beam crystal growth method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS589795B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5895694A (en) * | 1981-11-30 | 1983-06-07 | Fujitsu Ltd | Crystal growing method with molecular beam |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63154292U (en) * | 1987-03-30 | 1988-10-11 |
-
1976
- 1976-06-23 JP JP7479876A patent/JPS589795B2/en not_active Expired
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5895694A (en) * | 1981-11-30 | 1983-06-07 | Fujitsu Ltd | Crystal growing method with molecular beam |
JPH039076B2 (en) * | 1981-11-30 | 1991-02-07 | Fujitsu Ltd |
Also Published As
Publication number | Publication date |
---|---|
JPS589795B2 (en) | 1983-02-22 |
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Legal Events
Date | Code | Title | Description |
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A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20040728 |
|
A131 | Notification of reasons for refusal |
Effective date: 20070206 Free format text: JAPANESE INTERMEDIATE CODE: A131 |
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A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20070507 |
|
A602 | Written permission of extension of time |
Effective date: 20070625 Free format text: JAPANESE INTERMEDIATE CODE: A602 |
|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20070806 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20090407 |
|
A601 | Written request for extension of time |
Effective date: 20090707 Free format text: JAPANESE INTERMEDIATE CODE: A601 |
|
A602 | Written permission of extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A602 Effective date: 20090817 |
|
A313 | Final decision of rejection without a dissenting response from the applicant |
Effective date: 20091026 Free format text: JAPANESE INTERMEDIATE CODE: A313 |
|
A02 | Decision of refusal |
Effective date: 20091201 Free format text: JAPANESE INTERMEDIATE CODE: A02 |