JPS52149967A - Peeling method of wafers - Google Patents

Peeling method of wafers

Info

Publication number
JPS52149967A
JPS52149967A JP6737876A JP6737876A JPS52149967A JP S52149967 A JPS52149967 A JP S52149967A JP 6737876 A JP6737876 A JP 6737876A JP 6737876 A JP6737876 A JP 6737876A JP S52149967 A JPS52149967 A JP S52149967A
Authority
JP
Japan
Prior art keywords
wafers
peeling method
peel
wax
contamination
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6737876A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5641166B2 (enrdf_load_stackoverflow
Inventor
Masao Kachi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Home Electronics Ltd
NEC Corp
Original Assignee
NEC Home Electronics Ltd
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Home Electronics Ltd, Nippon Electric Co Ltd filed Critical NEC Home Electronics Ltd
Priority to JP6737876A priority Critical patent/JPS52149967A/ja
Publication of JPS52149967A publication Critical patent/JPS52149967A/ja
Publication of JPS5641166B2 publication Critical patent/JPS5641166B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Mechanical Treatment Of Semiconductor (AREA)
JP6737876A 1976-06-08 1976-06-08 Peeling method of wafers Granted JPS52149967A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6737876A JPS52149967A (en) 1976-06-08 1976-06-08 Peeling method of wafers

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6737876A JPS52149967A (en) 1976-06-08 1976-06-08 Peeling method of wafers

Publications (2)

Publication Number Publication Date
JPS52149967A true JPS52149967A (en) 1977-12-13
JPS5641166B2 JPS5641166B2 (enrdf_load_stackoverflow) 1981-09-26

Family

ID=13343281

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6737876A Granted JPS52149967A (en) 1976-06-08 1976-06-08 Peeling method of wafers

Country Status (1)

Country Link
JP (1) JPS52149967A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS5641166B2 (enrdf_load_stackoverflow) 1981-09-26

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