JPS52147988A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS52147988A JPS52147988A JP6410776A JP6410776A JPS52147988A JP S52147988 A JPS52147988 A JP S52147988A JP 6410776 A JP6410776 A JP 6410776A JP 6410776 A JP6410776 A JP 6410776A JP S52147988 A JPS52147988 A JP S52147988A
- Authority
- JP
- Japan
- Prior art keywords
- manufacture
- semiconductor device
- restrain
- wiring
- residual
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To prevent the grain occurrence on Al surface to restrain Al residual and thus to obtain good IC wiring by making Al surface layer into a chemical film abundant in chemical reaction properties.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6410776A JPS52147988A (en) | 1976-06-03 | 1976-06-03 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6410776A JPS52147988A (en) | 1976-06-03 | 1976-06-03 | Manufacture of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS52147988A true JPS52147988A (en) | 1977-12-08 |
Family
ID=13248512
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6410776A Pending JPS52147988A (en) | 1976-06-03 | 1976-06-03 | Manufacture of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52147988A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6284534A (en) * | 1985-10-08 | 1987-04-18 | Mitsubishi Electric Corp | Semiconductor device and manufacture thereof |
-
1976
- 1976-06-03 JP JP6410776A patent/JPS52147988A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6284534A (en) * | 1985-10-08 | 1987-04-18 | Mitsubishi Electric Corp | Semiconductor device and manufacture thereof |
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