JPS52147988A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS52147988A
JPS52147988A JP6410776A JP6410776A JPS52147988A JP S52147988 A JPS52147988 A JP S52147988A JP 6410776 A JP6410776 A JP 6410776A JP 6410776 A JP6410776 A JP 6410776A JP S52147988 A JPS52147988 A JP S52147988A
Authority
JP
Japan
Prior art keywords
manufacture
semiconductor device
restrain
wiring
residual
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6410776A
Other languages
Japanese (ja)
Inventor
Ushimatsu Moriyama
Akitoshi Kumagai
Yoichi Seta
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP6410776A priority Critical patent/JPS52147988A/en
Publication of JPS52147988A publication Critical patent/JPS52147988A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To prevent the grain occurrence on Al surface to restrain Al residual and thus to obtain good IC wiring by making Al surface layer into a chemical film abundant in chemical reaction properties.
COPYRIGHT: (C)1977,JPO&Japio
JP6410776A 1976-06-03 1976-06-03 Manufacture of semiconductor device Pending JPS52147988A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6410776A JPS52147988A (en) 1976-06-03 1976-06-03 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6410776A JPS52147988A (en) 1976-06-03 1976-06-03 Manufacture of semiconductor device

Publications (1)

Publication Number Publication Date
JPS52147988A true JPS52147988A (en) 1977-12-08

Family

ID=13248512

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6410776A Pending JPS52147988A (en) 1976-06-03 1976-06-03 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS52147988A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6284534A (en) * 1985-10-08 1987-04-18 Mitsubishi Electric Corp Semiconductor device and manufacture thereof

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6284534A (en) * 1985-10-08 1987-04-18 Mitsubishi Electric Corp Semiconductor device and manufacture thereof

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