JPS52147983A - Insulation gate type semiconductor device - Google Patents
Insulation gate type semiconductor deviceInfo
- Publication number
- JPS52147983A JPS52147983A JP6542276A JP6542276A JPS52147983A JP S52147983 A JPS52147983 A JP S52147983A JP 6542276 A JP6542276 A JP 6542276A JP 6542276 A JP6542276 A JP 6542276A JP S52147983 A JPS52147983 A JP S52147983A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor device
- type semiconductor
- window
- drain
- gate type
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000009413 insulation Methods 0.000 title abstract 3
- 239000004065 semiconductor Substances 0.000 title abstract 2
- 230000015572 biosynthetic process Effects 0.000 abstract 1
- 238000005530 etching Methods 0.000 abstract 1
- 230000003647 oxidation Effects 0.000 abstract 1
- 238000007254 oxidation reaction Methods 0.000 abstract 1
- 230000002093 peripheral effect Effects 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
Landscapes
- Local Oxidation Of Silicon (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6542276A JPS52147983A (en) | 1976-06-03 | 1976-06-03 | Insulation gate type semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6542276A JPS52147983A (en) | 1976-06-03 | 1976-06-03 | Insulation gate type semiconductor device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS52147983A true JPS52147983A (en) | 1977-12-08 |
JPS6158986B2 JPS6158986B2 (enrdf_load_stackoverflow) | 1986-12-13 |
Family
ID=13286601
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6542276A Granted JPS52147983A (en) | 1976-06-03 | 1976-06-03 | Insulation gate type semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52147983A (enrdf_load_stackoverflow) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS53142188A (en) * | 1977-05-17 | 1978-12-11 | Matsushita Electric Ind Co Ltd | Semiconductor device and its manufacture |
JPS56130973A (en) * | 1980-03-17 | 1981-10-14 | Fujitsu Ltd | Manufacture of semiconductor device |
-
1976
- 1976-06-03 JP JP6542276A patent/JPS52147983A/ja active Granted
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS53142188A (en) * | 1977-05-17 | 1978-12-11 | Matsushita Electric Ind Co Ltd | Semiconductor device and its manufacture |
JPS56130973A (en) * | 1980-03-17 | 1981-10-14 | Fujitsu Ltd | Manufacture of semiconductor device |
Also Published As
Publication number | Publication date |
---|---|
JPS6158986B2 (enrdf_load_stackoverflow) | 1986-12-13 |
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