JPS52146217A - Positive type radiation sensitive material - Google Patents

Positive type radiation sensitive material

Info

Publication number
JPS52146217A
JPS52146217A JP6227176A JP6227176A JPS52146217A JP S52146217 A JPS52146217 A JP S52146217A JP 6227176 A JP6227176 A JP 6227176A JP 6227176 A JP6227176 A JP 6227176A JP S52146217 A JPS52146217 A JP S52146217A
Authority
JP
Japan
Prior art keywords
sensitive material
radiation sensitive
positive type
type radiation
methacroylacetone
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6227176A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5347161B2 (enExample
Inventor
Masataka Miyamura
Akira Miura
Tsukasa Tada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP6227176A priority Critical patent/JPS52146217A/ja
Publication of JPS52146217A publication Critical patent/JPS52146217A/ja
Publication of JPS5347161B2 publication Critical patent/JPS5347161B2/ja
Granted legal-status Critical Current

Links

JP6227176A 1976-05-31 1976-05-31 Positive type radiation sensitive material Granted JPS52146217A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6227176A JPS52146217A (en) 1976-05-31 1976-05-31 Positive type radiation sensitive material

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6227176A JPS52146217A (en) 1976-05-31 1976-05-31 Positive type radiation sensitive material

Publications (2)

Publication Number Publication Date
JPS52146217A true JPS52146217A (en) 1977-12-05
JPS5347161B2 JPS5347161B2 (enExample) 1978-12-19

Family

ID=13195308

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6227176A Granted JPS52146217A (en) 1976-05-31 1976-05-31 Positive type radiation sensitive material

Country Status (1)

Country Link
JP (1) JPS52146217A (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5517112A (en) * 1978-07-21 1980-02-06 Chiyou Lsi Gijutsu Kenkyu Kumiai Positive type radiation sensitive composition
JPS6129839A (ja) * 1984-07-23 1986-02-10 Nippon Telegr & Teleph Corp <Ntt> ポジ形レジスト組成物
WO1986001009A1 (fr) * 1984-07-23 1986-02-13 Nippon Telegraph And Telephone Corporation Formation de motifs
JPS62229240A (ja) * 1986-03-31 1987-10-08 Canon Inc 重合性薄膜

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5517112A (en) * 1978-07-21 1980-02-06 Chiyou Lsi Gijutsu Kenkyu Kumiai Positive type radiation sensitive composition
JPS6129839A (ja) * 1984-07-23 1986-02-10 Nippon Telegr & Teleph Corp <Ntt> ポジ形レジスト組成物
WO1986001009A1 (fr) * 1984-07-23 1986-02-13 Nippon Telegraph And Telephone Corporation Formation de motifs
US4699870A (en) * 1984-07-23 1987-10-13 Nippon Telegraph And Telephone Corporation Patterning method
JPS62229240A (ja) * 1986-03-31 1987-10-08 Canon Inc 重合性薄膜

Also Published As

Publication number Publication date
JPS5347161B2 (enExample) 1978-12-19

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