JPS52142680A - Evaporation apparatus - Google Patents

Evaporation apparatus

Info

Publication number
JPS52142680A
JPS52142680A JP5965576A JP5965576A JPS52142680A JP S52142680 A JPS52142680 A JP S52142680A JP 5965576 A JP5965576 A JP 5965576A JP 5965576 A JP5965576 A JP 5965576A JP S52142680 A JPS52142680 A JP S52142680A
Authority
JP
Japan
Prior art keywords
mask
plate
evaporation apparatus
evaporated
making
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5965576A
Other languages
Japanese (ja)
Inventor
Hiroshi Motoyama
Tsuneichi Yoshino
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP5965576A priority Critical patent/JPS52142680A/en
Publication of JPS52142680A publication Critical patent/JPS52142680A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/042—Coating on selected surface areas, e.g. using masks using masks

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

PURPOSE:To evaporate onto a plate of different areas continuously by use of the same evaporation mask by making up the mask so that one part of the open end of the mask pattern contacts closely to the surface of the plate to be evaporated and the other part separates from the surface.
JP5965576A 1976-05-25 1976-05-25 Evaporation apparatus Pending JPS52142680A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5965576A JPS52142680A (en) 1976-05-25 1976-05-25 Evaporation apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5965576A JPS52142680A (en) 1976-05-25 1976-05-25 Evaporation apparatus

Publications (1)

Publication Number Publication Date
JPS52142680A true JPS52142680A (en) 1977-11-28

Family

ID=13119424

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5965576A Pending JPS52142680A (en) 1976-05-25 1976-05-25 Evaporation apparatus

Country Status (1)

Country Link
JP (1) JPS52142680A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0617232A (en) * 1991-11-07 1994-01-25 Hankuk Shinchoru Gankisuru Yongjohabu Si/zn two-layer galvanized steel sheet excellent in corrosion resistance and having beautiful appearance and its production
JP2016023321A (en) * 2014-07-17 2016-02-08 有限会社ファームファクトリー Vacuum evaporation apparatus

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0617232A (en) * 1991-11-07 1994-01-25 Hankuk Shinchoru Gankisuru Yongjohabu Si/zn two-layer galvanized steel sheet excellent in corrosion resistance and having beautiful appearance and its production
JPH0762237B2 (en) * 1991-11-07 1995-07-05 ハングックシンチョルガンキスルヨングジョハブ Method for producing Si / Zn double-layer plated steel sheet with excellent corrosion resistance and beautiful appearance
JP2016023321A (en) * 2014-07-17 2016-02-08 有限会社ファームファクトリー Vacuum evaporation apparatus

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