JPS52137977A - Liquid phase growth apparatus for compound semiconductors - Google Patents

Liquid phase growth apparatus for compound semiconductors

Info

Publication number
JPS52137977A
JPS52137977A JP5485276A JP5485276A JPS52137977A JP S52137977 A JPS52137977 A JP S52137977A JP 5485276 A JP5485276 A JP 5485276A JP 5485276 A JP5485276 A JP 5485276A JP S52137977 A JPS52137977 A JP S52137977A
Authority
JP
Japan
Prior art keywords
compound semiconductors
liquid phase
phase growth
growth apparatus
letting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5485276A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5532211B2 (enrdf_load_stackoverflow
Inventor
Makoto Naito
Masaru Kawachi
Tadashi Komatsubara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP5485276A priority Critical patent/JPS52137977A/ja
Publication of JPS52137977A publication Critical patent/JPS52137977A/ja
Publication of JPS5532211B2 publication Critical patent/JPS5532211B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Led Devices (AREA)
JP5485276A 1976-05-14 1976-05-14 Liquid phase growth apparatus for compound semiconductors Granted JPS52137977A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5485276A JPS52137977A (en) 1976-05-14 1976-05-14 Liquid phase growth apparatus for compound semiconductors

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5485276A JPS52137977A (en) 1976-05-14 1976-05-14 Liquid phase growth apparatus for compound semiconductors

Publications (2)

Publication Number Publication Date
JPS52137977A true JPS52137977A (en) 1977-11-17
JPS5532211B2 JPS5532211B2 (enrdf_load_stackoverflow) 1980-08-23

Family

ID=12982114

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5485276A Granted JPS52137977A (en) 1976-05-14 1976-05-14 Liquid phase growth apparatus for compound semiconductors

Country Status (1)

Country Link
JP (1) JPS52137977A (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3933123A (en) * 1971-07-13 1976-01-20 U.S. Philips Corporation Liquid phase epitaxy

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3933123A (en) * 1971-07-13 1976-01-20 U.S. Philips Corporation Liquid phase epitaxy

Also Published As

Publication number Publication date
JPS5532211B2 (enrdf_load_stackoverflow) 1980-08-23

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