JPS52135689A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS52135689A
JPS52135689A JP5293376A JP5293376A JPS52135689A JP S52135689 A JPS52135689 A JP S52135689A JP 5293376 A JP5293376 A JP 5293376A JP 5293376 A JP5293376 A JP 5293376A JP S52135689 A JPS52135689 A JP S52135689A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
wirings
narrowing
integration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5293376A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5749135B2 (enrdf_load_html_response
Inventor
Shigeharu Abe
Osamu Hataishi
Makoto Serigano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP5293376A priority Critical patent/JPS52135689A/ja
Publication of JPS52135689A publication Critical patent/JPS52135689A/ja
Publication of JPS5749135B2 publication Critical patent/JPS5749135B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Weting (AREA)
JP5293376A 1976-05-10 1976-05-10 Production of semiconductor device Granted JPS52135689A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5293376A JPS52135689A (en) 1976-05-10 1976-05-10 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5293376A JPS52135689A (en) 1976-05-10 1976-05-10 Production of semiconductor device

Publications (2)

Publication Number Publication Date
JPS52135689A true JPS52135689A (en) 1977-11-12
JPS5749135B2 JPS5749135B2 (enrdf_load_html_response) 1982-10-20

Family

ID=12928643

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5293376A Granted JPS52135689A (en) 1976-05-10 1976-05-10 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS52135689A (enrdf_load_html_response)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5635435A (en) * 1979-08-31 1981-04-08 Fujitsu Ltd Manufacturing of semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5635435A (en) * 1979-08-31 1981-04-08 Fujitsu Ltd Manufacturing of semiconductor device

Also Published As

Publication number Publication date
JPS5749135B2 (enrdf_load_html_response) 1982-10-20

Similar Documents

Publication Publication Date Title
JPS528785A (en) Semiconductor device electrode structure
JPS5244186A (en) Semiconductor intergrated circuit device
JPS5272582A (en) Production of semiconductor device
JPS53120383A (en) Production of semiconductor device
JPS5328384A (en) Production method of semiconductor device
JPS52135689A (en) Production of semiconductor device
JPS51121272A (en) Manufacturing method for semiconductor devices
JPS5271978A (en) Production of semiconductor device
JPS538072A (en) Semiconductor device
JPS5228868A (en) Semiconductor device
JPS5276889A (en) Production of semiconductor device
JPS5441666A (en) Semiconductor integrated circuit element
JPS51113478A (en) The manufacturing method of semiconductor device
JPS5282083A (en) Production of semiconductor device
JPS51123086A (en) Semicanductor device and its production process
JPS52153383A (en) Preparation of semiconductor device
JPS5419367A (en) Production of semiconductor device
JPS5313883A (en) Semiconductor device and its production
JPS51112266A (en) Semiconductor device production method
JPS53147487A (en) Semiconductor device
JPS5424574A (en) Manufacture for semiconductor device
JPS539483A (en) Semiconductor device
JPS52143767A (en) Production of semiconductor device
JPS5349972A (en) Manufacture of semiconductor device
JPS5363866A (en) Production of semiconductor device