JPS52135689A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS52135689A
JPS52135689A JP5293376A JP5293376A JPS52135689A JP S52135689 A JPS52135689 A JP S52135689A JP 5293376 A JP5293376 A JP 5293376A JP 5293376 A JP5293376 A JP 5293376A JP S52135689 A JPS52135689 A JP S52135689A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
wirings
narrowing
integration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5293376A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5749135B2 (cs
Inventor
Shigeharu Abe
Osamu Hataishi
Makoto Serigano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP5293376A priority Critical patent/JPS52135689A/ja
Publication of JPS52135689A publication Critical patent/JPS52135689A/ja
Publication of JPS5749135B2 publication Critical patent/JPS5749135B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Weting (AREA)
JP5293376A 1976-05-10 1976-05-10 Production of semiconductor device Granted JPS52135689A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5293376A JPS52135689A (en) 1976-05-10 1976-05-10 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5293376A JPS52135689A (en) 1976-05-10 1976-05-10 Production of semiconductor device

Publications (2)

Publication Number Publication Date
JPS52135689A true JPS52135689A (en) 1977-11-12
JPS5749135B2 JPS5749135B2 (cs) 1982-10-20

Family

ID=12928643

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5293376A Granted JPS52135689A (en) 1976-05-10 1976-05-10 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS52135689A (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5635435A (en) * 1979-08-31 1981-04-08 Fujitsu Ltd Manufacturing of semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5635435A (en) * 1979-08-31 1981-04-08 Fujitsu Ltd Manufacturing of semiconductor device

Also Published As

Publication number Publication date
JPS5749135B2 (cs) 1982-10-20

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