JPS52135681A - Electron beam exposure apparatus - Google Patents

Electron beam exposure apparatus

Info

Publication number
JPS52135681A
JPS52135681A JP5214876A JP5214876A JPS52135681A JP S52135681 A JPS52135681 A JP S52135681A JP 5214876 A JP5214876 A JP 5214876A JP 5214876 A JP5214876 A JP 5214876A JP S52135681 A JPS52135681 A JP S52135681A
Authority
JP
Japan
Prior art keywords
electron beam
exposure apparatus
beam exposure
lead wires
stage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5214876A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5613376B2 (enrdf_load_stackoverflow
Inventor
Shuntaro Hata
Yoshio Murakami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP5214876A priority Critical patent/JPS52135681A/ja
Publication of JPS52135681A publication Critical patent/JPS52135681A/ja
Publication of JPS5613376B2 publication Critical patent/JPS5613376B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
JP5214876A 1976-05-10 1976-05-10 Electron beam exposure apparatus Granted JPS52135681A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5214876A JPS52135681A (en) 1976-05-10 1976-05-10 Electron beam exposure apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5214876A JPS52135681A (en) 1976-05-10 1976-05-10 Electron beam exposure apparatus

Publications (2)

Publication Number Publication Date
JPS52135681A true JPS52135681A (en) 1977-11-12
JPS5613376B2 JPS5613376B2 (enrdf_load_stackoverflow) 1981-03-27

Family

ID=12906779

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5214876A Granted JPS52135681A (en) 1976-05-10 1976-05-10 Electron beam exposure apparatus

Country Status (1)

Country Link
JP (1) JPS52135681A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS551110A (en) * 1978-06-16 1980-01-07 Fujitsu Ltd Exposure to electron beam
JPS55162004A (en) * 1979-06-06 1980-12-17 Toshiba Corp Electric charge corpuscular ray irradiation unit

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS551110A (en) * 1978-06-16 1980-01-07 Fujitsu Ltd Exposure to electron beam
JPS55162004A (en) * 1979-06-06 1980-12-17 Toshiba Corp Electric charge corpuscular ray irradiation unit

Also Published As

Publication number Publication date
JPS5613376B2 (enrdf_load_stackoverflow) 1981-03-27

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