JPS5613376B2 - - Google Patents

Info

Publication number
JPS5613376B2
JPS5613376B2 JP5214876A JP5214876A JPS5613376B2 JP S5613376 B2 JPS5613376 B2 JP S5613376B2 JP 5214876 A JP5214876 A JP 5214876A JP 5214876 A JP5214876 A JP 5214876A JP S5613376 B2 JPS5613376 B2 JP S5613376B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP5214876A
Other languages
Japanese (ja)
Other versions
JPS52135681A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5214876A priority Critical patent/JPS52135681A/ja
Publication of JPS52135681A publication Critical patent/JPS52135681A/ja
Publication of JPS5613376B2 publication Critical patent/JPS5613376B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
JP5214876A 1976-05-10 1976-05-10 Electron beam exposure apparatus Granted JPS52135681A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5214876A JPS52135681A (en) 1976-05-10 1976-05-10 Electron beam exposure apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5214876A JPS52135681A (en) 1976-05-10 1976-05-10 Electron beam exposure apparatus

Publications (2)

Publication Number Publication Date
JPS52135681A JPS52135681A (en) 1977-11-12
JPS5613376B2 true JPS5613376B2 (enrdf_load_stackoverflow) 1981-03-27

Family

ID=12906779

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5214876A Granted JPS52135681A (en) 1976-05-10 1976-05-10 Electron beam exposure apparatus

Country Status (1)

Country Link
JP (1) JPS52135681A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS551110A (en) * 1978-06-16 1980-01-07 Fujitsu Ltd Exposure to electron beam
JPS55162004A (en) * 1979-06-06 1980-12-17 Toshiba Corp Electric charge corpuscular ray irradiation unit

Also Published As

Publication number Publication date
JPS52135681A (en) 1977-11-12

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