JPS5216176A - Ion driving device - Google Patents

Ion driving device

Info

Publication number
JPS5216176A
JPS5216176A JP9189075A JP9189075A JPS5216176A JP S5216176 A JPS5216176 A JP S5216176A JP 9189075 A JP9189075 A JP 9189075A JP 9189075 A JP9189075 A JP 9189075A JP S5216176 A JPS5216176 A JP S5216176A
Authority
JP
Japan
Prior art keywords
driving device
ion driving
ion
improved
production efficiency
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9189075A
Other languages
Japanese (ja)
Inventor
Masaru Takeuchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP9189075A priority Critical patent/JPS5216176A/en
Publication of JPS5216176A publication Critical patent/JPS5216176A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: The ion driving device automated in the voltage adjustment operation and improved in the production efficiency.
COPYRIGHT: (C)1977,JPO&Japio
JP9189075A 1975-07-30 1975-07-30 Ion driving device Pending JPS5216176A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9189075A JPS5216176A (en) 1975-07-30 1975-07-30 Ion driving device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9189075A JPS5216176A (en) 1975-07-30 1975-07-30 Ion driving device

Publications (1)

Publication Number Publication Date
JPS5216176A true JPS5216176A (en) 1977-02-07

Family

ID=14039141

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9189075A Pending JPS5216176A (en) 1975-07-30 1975-07-30 Ion driving device

Country Status (1)

Country Link
JP (1) JPS5216176A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58176435A (en) * 1982-04-09 1983-10-15 Hitachi Ltd Automobile engine control device
JPS60232656A (en) * 1984-04-28 1985-11-19 Nissin Electric Co Ltd Ion implanting equipment

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51137369A (en) * 1975-05-23 1976-11-27 Hitachi Ltd Automatic shaft alignment unit for electron optics system

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51137369A (en) * 1975-05-23 1976-11-27 Hitachi Ltd Automatic shaft alignment unit for electron optics system

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58176435A (en) * 1982-04-09 1983-10-15 Hitachi Ltd Automobile engine control device
JPS60232656A (en) * 1984-04-28 1985-11-19 Nissin Electric Co Ltd Ion implanting equipment

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