JPS5216176A - Ion driving device - Google Patents
Ion driving deviceInfo
- Publication number
- JPS5216176A JPS5216176A JP9189075A JP9189075A JPS5216176A JP S5216176 A JPS5216176 A JP S5216176A JP 9189075 A JP9189075 A JP 9189075A JP 9189075 A JP9189075 A JP 9189075A JP S5216176 A JPS5216176 A JP S5216176A
- Authority
- JP
- Japan
- Prior art keywords
- driving device
- ion driving
- ion
- improved
- production efficiency
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: The ion driving device automated in the voltage adjustment operation and improved in the production efficiency.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9189075A JPS5216176A (en) | 1975-07-30 | 1975-07-30 | Ion driving device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9189075A JPS5216176A (en) | 1975-07-30 | 1975-07-30 | Ion driving device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5216176A true JPS5216176A (en) | 1977-02-07 |
Family
ID=14039141
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9189075A Pending JPS5216176A (en) | 1975-07-30 | 1975-07-30 | Ion driving device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5216176A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58176435A (en) * | 1982-04-09 | 1983-10-15 | Hitachi Ltd | Automobile engine control device |
JPS60232656A (en) * | 1984-04-28 | 1985-11-19 | Nissin Electric Co Ltd | Ion implanting equipment |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS51137369A (en) * | 1975-05-23 | 1976-11-27 | Hitachi Ltd | Automatic shaft alignment unit for electron optics system |
-
1975
- 1975-07-30 JP JP9189075A patent/JPS5216176A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS51137369A (en) * | 1975-05-23 | 1976-11-27 | Hitachi Ltd | Automatic shaft alignment unit for electron optics system |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58176435A (en) * | 1982-04-09 | 1983-10-15 | Hitachi Ltd | Automobile engine control device |
JPS60232656A (en) * | 1984-04-28 | 1985-11-19 | Nissin Electric Co Ltd | Ion implanting equipment |
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