JPS52124878A - Production of semiconductor integrated circuit - Google Patents

Production of semiconductor integrated circuit

Info

Publication number
JPS52124878A
JPS52124878A JP4089476A JP4089476A JPS52124878A JP S52124878 A JPS52124878 A JP S52124878A JP 4089476 A JP4089476 A JP 4089476A JP 4089476 A JP4089476 A JP 4089476A JP S52124878 A JPS52124878 A JP S52124878A
Authority
JP
Japan
Prior art keywords
production
integrated circuit
semiconductor integrated
thyristors
ics
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4089476A
Other languages
Japanese (ja)
Inventor
Yutaka Oota
Taiji Usui
Susumu Matsuoka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP4089476A priority Critical patent/JPS52124878A/en
Publication of JPS52124878A publication Critical patent/JPS52124878A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
    • H01L21/76297—Dielectric isolation using EPIC techniques, i.e. epitaxial passivated integrated circuit
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof  ; Multistep manufacturing processes therefor
    • H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
    • H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
    • H01L29/0603—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions
    • H01L29/0642—Isolation within the component, i.e. internal isolation
    • H01L29/0649—Dielectric regions, e.g. SiO2 regions, air gaps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof  ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/70—Bipolar devices
    • H01L29/74—Thyristor-type devices, e.g. having four-zone regenerative action
    • H01L29/7436—Lateral thyristors

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Element Separation (AREA)

Abstract

PURPOSE:To increase the scale of integration of ICs of thyristors, etc. by forming isolating grooves from the top and bottom surfaces of a semiconductor substrate to make dielectric isolation structure.
JP4089476A 1976-04-13 1976-04-13 Production of semiconductor integrated circuit Pending JPS52124878A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4089476A JPS52124878A (en) 1976-04-13 1976-04-13 Production of semiconductor integrated circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4089476A JPS52124878A (en) 1976-04-13 1976-04-13 Production of semiconductor integrated circuit

Publications (1)

Publication Number Publication Date
JPS52124878A true JPS52124878A (en) 1977-10-20

Family

ID=12593206

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4089476A Pending JPS52124878A (en) 1976-04-13 1976-04-13 Production of semiconductor integrated circuit

Country Status (1)

Country Link
JP (1) JPS52124878A (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4941956A (en) * 1972-05-01 1974-04-19
US3969749A (en) * 1974-04-01 1976-07-13 Texas Instruments Incorporated Substrate for dielectric isolated integrated circuit with V-etched depth grooves for lapping guide

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4941956A (en) * 1972-05-01 1974-04-19
US3969749A (en) * 1974-04-01 1976-07-13 Texas Instruments Incorporated Substrate for dielectric isolated integrated circuit with V-etched depth grooves for lapping guide

Similar Documents

Publication Publication Date Title
JPS543480A (en) Manufacture of semiconductor device
JPS5350686A (en) Production of semiconductor integrated circuit
JPS51130183A (en) Semiconductor ic and its process
JPS52156580A (en) Semiconductor integrated circuit device and its production
JPS52124878A (en) Production of semiconductor integrated circuit
JPS5378789A (en) Manufacture of semiconductor integrated circuit
JPS5283070A (en) Production of semiconductor device
JPS5357978A (en) Production of dielectric insulated and isolated substrate
JPS5412263A (en) Semiconductor element and production of the same
JPS52119084A (en) Manufacture of semiconductor integrated circuit
JPS52155982A (en) Semiconductor device
JPS5329086A (en) Production of semiconductor device
JPS5276889A (en) Production of semiconductor device
JPS5316586A (en) Semiconductor device
JPS5435791A (en) Semiconductor pressure sensor
JPS5230390A (en) Integrated circuit of the semiconductor
JPS5387186A (en) Semiconductor ingegrated circuit device
JPS5282083A (en) Production of semiconductor device
JPS5368165A (en) Production of semiconductor device
JPS5441666A (en) Semiconductor integrated circuit element
JPS5279677A (en) Semiconductor integrated circuit
JPS52142974A (en) Semiconductor device
JPS53136492A (en) Manufacture for semiconductor integrated circuit substrate
JPS5399782A (en) Semiconductor integrated circuit device and its manufacture
JPS5353988A (en) Semiconductor integrated circuit