JPS52115752A - Etching liquid - Google Patents
Etching liquidInfo
- Publication number
- JPS52115752A JPS52115752A JP29777A JP29777A JPS52115752A JP S52115752 A JPS52115752 A JP S52115752A JP 29777 A JP29777 A JP 29777A JP 29777 A JP29777 A JP 29777A JP S52115752 A JPS52115752 A JP S52115752A
- Authority
- JP
- Japan
- Prior art keywords
- etching liquid
- etching
- liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
- C23F1/10—Etching compositions
- C23F1/14—Aqueous compositions
- C23F1/16—Acidic compositions
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
- C23F1/10—Etching compositions
- C23F1/14—Aqueous compositions
- C23F1/16—Acidic compositions
- C23F1/18—Acidic compositions for etching copper or alloys thereof
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- ing And Chemical Polishing (AREA)
- Manufacturing Of Printed Circuit Boards (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US64647676A | 1976-01-05 | 1976-01-05 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS52115752A true JPS52115752A (en) | 1977-09-28 |
JPS5440448B2 JPS5440448B2 (pt-PT) | 1979-12-04 |
Family
ID=24593221
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP29777A Granted JPS52115752A (en) | 1976-01-05 | 1977-01-05 | Etching liquid |
Country Status (8)
Country | Link |
---|---|
US (1) | US4130454A (pt-PT) |
JP (1) | JPS52115752A (pt-PT) |
DE (1) | DE2700265C3 (pt-PT) |
FR (1) | FR2337189A1 (pt-PT) |
GB (1) | GB1546524A (pt-PT) |
IT (1) | IT1080302B (pt-PT) |
NL (1) | NL7700022A (pt-PT) |
SE (1) | SE425007B (pt-PT) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55154580A (en) * | 1979-05-22 | 1980-12-02 | Yamatoya Shokai:Kk | Copper etching bath |
JPS61591A (ja) * | 1984-06-13 | 1986-01-06 | Fujitsu Ltd | 銅のエツチング方法 |
JP2006521464A (ja) * | 2003-03-25 | 2006-09-21 | アトーテヒ ドイッチュラント ゲゼルシャフト ミット ベシュレンクテル ハフツング | 銅表面をエッチングするための溶液と銅表面に金属を蒸着させる方法 |
WO2021220476A1 (ja) * | 2020-04-30 | 2021-11-04 | パナソニックIpマネジメント株式会社 | エッチング液 |
Families Citing this family (26)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
IT1083401B (it) * | 1977-05-27 | 1985-05-21 | Alfachimici Spa | Soluzione acida per l'attacco selettivo del rame |
US4174253A (en) * | 1977-11-08 | 1979-11-13 | Dart Industries Inc. | Dissolution of metals utilizing a H2 O2 -H2 SO4 solution catalyzed with hydroxy substituted cycloparaffins |
US4141850A (en) * | 1977-11-08 | 1979-02-27 | Dart Industries Inc. | Dissolution of metals |
CA1209886A (en) * | 1982-01-11 | 1986-08-19 | Thomas W. Bleeks | Peroxide selective stripping compositions and method |
JPS58197277A (ja) * | 1982-05-08 | 1983-11-16 | Mitsubishi Gas Chem Co Inc | 金属の化学的溶解処理液 |
US4451327A (en) * | 1982-12-17 | 1984-05-29 | Psi Star, Inc. | Process and structure for etching copper |
US4636282A (en) * | 1985-06-20 | 1987-01-13 | Great Lakes Chemical Corporation | Method for etching copper and composition useful therein |
US5100500A (en) * | 1991-02-08 | 1992-03-31 | Aluminum Company Of America | Milling solution and method |
US5248386A (en) * | 1991-02-08 | 1993-09-28 | Aluminum Company Of America | Milling solution and method |
DE4402788A1 (de) * | 1994-01-31 | 1995-08-10 | Emil Krechen Industrievertretu | Verfahren zum Abtragen von Metallen |
JP3400558B2 (ja) * | 1994-08-12 | 2003-04-28 | メック株式会社 | 銅および銅合金のエッチング液 |
GB9425090D0 (en) * | 1994-12-12 | 1995-02-08 | Alpha Metals Ltd | Copper coating |
JP4033611B2 (ja) * | 2000-07-28 | 2008-01-16 | メック株式会社 | 銅または銅合金のマイクロエッチング剤およびそれを用いるマイクロエッチング法 |
KR100379824B1 (ko) * | 2000-12-20 | 2003-04-11 | 엘지.필립스 엘시디 주식회사 | 식각용액 및 식각용액으로 패턴된 구리배선을 가지는전자기기용 어레이기판 |
US6319846B1 (en) * | 2001-01-05 | 2001-11-20 | Taiwan Semiconductor Manufacturing Company, Ltd | Method for removing solder bodies from a semiconductor wafer |
JP2002256460A (ja) * | 2001-02-09 | 2002-09-11 | Nippon Parkerizing Co Ltd | アルミニウムおよびアルミニウム合金に用いるエッチングとデスマッティング用の組成物及びその方法 |
US6953389B2 (en) * | 2001-08-09 | 2005-10-11 | Cheil Industries, Inc. | Metal CMP slurry compositions that favor mechanical removal of oxides with reduced susceptibility to micro-scratching |
TW591089B (en) * | 2001-08-09 | 2004-06-11 | Cheil Ind Inc | Slurry composition for use in chemical mechanical polishing of metal wiring |
DE10302596A1 (de) * | 2002-01-24 | 2003-08-28 | Shipley Company Marlborough | Behandlung von Metalloberflächen mit einer modifizierten Oxidaustauschmasse |
US20060124026A1 (en) * | 2004-12-10 | 2006-06-15 | 3M Innovative Properties Company | Polishing solutions |
US7435162B2 (en) * | 2005-10-24 | 2008-10-14 | 3M Innovative Properties Company | Polishing fluids and methods for CMP |
DE602008002819D1 (de) * | 2007-02-14 | 2010-11-11 | Mallinckrodt Baker Inc | Peroxid-aktivierte formulierungen auf oxometalat-basis zur entfernung von ätzungsresten |
US20090001339A1 (en) * | 2007-06-29 | 2009-01-01 | Tae Young Lee | Chemical Mechanical Polishing Slurry Composition for Polishing Phase-Change Memory Device and Method for Polishing Phase-Change Memory Device Using the Same |
KR20090002506A (ko) * | 2007-06-29 | 2009-01-09 | 제일모직주식회사 | 상변화 메모리 소자 연마용 cmp 슬러리 조성물 및 이를이용한 연마 방법 |
US8211617B2 (en) * | 2009-08-17 | 2012-07-03 | Palo Alto Research Center Incorporated | Solid inks for printed masks |
US8303832B2 (en) * | 2009-08-17 | 2012-11-06 | Palo Alto Research Center Incorporated | Solid inks for masks for printed circuit boards and other electronic devices |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2377593A (en) * | 1942-02-09 | 1945-06-05 | Packard Motor Car Co | Etching ink |
US2441300A (en) * | 1944-08-21 | 1948-05-11 | Packard Motor Car Co | Ink for etching metal |
-
1976
- 1976-12-31 SE SE7700015A patent/SE425007B/xx not_active IP Right Cessation
-
1977
- 1977-01-04 FR FR7700089A patent/FR2337189A1/fr active Granted
- 1977-01-04 NL NL7700022A patent/NL7700022A/xx not_active Application Discontinuation
- 1977-01-05 IT IT19074/77A patent/IT1080302B/it active
- 1977-01-05 GB GB155/77A patent/GB1546524A/en not_active Expired
- 1977-01-05 DE DE2700265A patent/DE2700265C3/de not_active Expired
- 1977-01-05 JP JP29777A patent/JPS52115752A/ja active Granted
- 1977-09-30 US US05/822,002 patent/US4130454A/en not_active Expired - Lifetime
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55154580A (en) * | 1979-05-22 | 1980-12-02 | Yamatoya Shokai:Kk | Copper etching bath |
JPS61591A (ja) * | 1984-06-13 | 1986-01-06 | Fujitsu Ltd | 銅のエツチング方法 |
JP2006521464A (ja) * | 2003-03-25 | 2006-09-21 | アトーテヒ ドイッチュラント ゲゼルシャフト ミット ベシュレンクテル ハフツング | 銅表面をエッチングするための溶液と銅表面に金属を蒸着させる方法 |
WO2021220476A1 (ja) * | 2020-04-30 | 2021-11-04 | パナソニックIpマネジメント株式会社 | エッチング液 |
Also Published As
Publication number | Publication date |
---|---|
GB1546524A (en) | 1979-05-23 |
DE2700265B2 (de) | 1978-06-29 |
DE2700265C3 (de) | 1979-02-22 |
US4130454A (en) | 1978-12-19 |
SE7700015L (sv) | 1977-07-06 |
FR2337189B1 (pt-PT) | 1979-03-09 |
FR2337189A1 (fr) | 1977-07-29 |
DE2700265A1 (de) | 1977-07-14 |
SE425007B (sv) | 1982-08-23 |
IT1080302B (it) | 1985-05-16 |
NL7700022A (nl) | 1977-07-07 |
JPS5440448B2 (pt-PT) | 1979-12-04 |
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