IT1083401B - Soluzione acida per l'attacco selettivo del rame - Google Patents

Soluzione acida per l'attacco selettivo del rame

Info

Publication number
IT1083401B
IT1083401B IT6821377A IT6821377A IT1083401B IT 1083401 B IT1083401 B IT 1083401B IT 6821377 A IT6821377 A IT 6821377A IT 6821377 A IT6821377 A IT 6821377A IT 1083401 B IT1083401 B IT 1083401B
Authority
IT
Italy
Prior art keywords
acid solution
selective copper
copper attack
attack
selective
Prior art date
Application number
IT6821377A
Other languages
English (en)
Inventor
Guido Foco
Michele Capano
Original Assignee
Alfachimici Spa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alfachimici Spa filed Critical Alfachimici Spa
Priority to IT6821377A priority Critical patent/IT1083401B/it
Priority to DE19782823068 priority patent/DE2823068A1/de
Priority to FR7815735A priority patent/FR2392100A1/fr
Application granted granted Critical
Publication of IT1083401B publication Critical patent/IT1083401B/it

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • C23F1/10—Etching compositions
    • C23F1/14—Aqueous compositions
    • C23F1/16—Acidic compositions
    • C23F1/18—Acidic compositions for etching copper or alloys thereof
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
    • H05K3/06—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed chemically or electrolytically, e.g. by photo-etch process
    • H05K3/067—Etchants

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • ing And Chemical Polishing (AREA)
IT6821377A 1977-05-27 1977-05-27 Soluzione acida per l'attacco selettivo del rame IT1083401B (it)

Priority Applications (3)

Application Number Priority Date Filing Date Title
IT6821377A IT1083401B (it) 1977-05-27 1977-05-27 Soluzione acida per l'attacco selettivo del rame
DE19782823068 DE2823068A1 (de) 1977-05-27 1978-05-26 Saure loesung fuer den selektiven angriff von kupfer
FR7815735A FR2392100A1 (fr) 1977-05-27 1978-05-26 Solution acide pour corrosion selective du cuivre

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT6821377A IT1083401B (it) 1977-05-27 1977-05-27 Soluzione acida per l'attacco selettivo del rame

Publications (1)

Publication Number Publication Date
IT1083401B true IT1083401B (it) 1985-05-21

Family

ID=11308516

Family Applications (1)

Application Number Title Priority Date Filing Date
IT6821377A IT1083401B (it) 1977-05-27 1977-05-27 Soluzione acida per l'attacco selettivo del rame

Country Status (3)

Country Link
DE (1) DE2823068A1 (it)
FR (1) FR2392100A1 (it)
IT (1) IT1083401B (it)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3046477A1 (de) * 1980-12-10 1982-07-08 Gebr. Schmid Maschinenfabrik GmbH & Co, 7290 Freudenstadt "verfahren zum aetzen von metalloberflaechen"
US4750976A (en) * 1984-12-19 1988-06-14 Blasberg Oberflachentechnik Gmbh Electrically conductive copper layers and process for preparing same
DE3539886A1 (de) * 1985-11-11 1987-05-14 Hoellmueller Maschbau H Verfahren und vorrichtung zum aetzen eines zumindest teilweise aus metall, vorzugsweise kupfer, bestehenden aetzguts
FR2621052A1 (fr) * 1987-09-25 1989-03-31 Solvay Bains et procede pour le polissage chimique de surfaces en cuivre ou en alliage de cuivre
BE1003761A3 (fr) * 1989-10-24 1992-06-09 Solvay Bains et procede pour le polissage chimique de surfaces en cuivre ou en alliage de cuivre.
US5098516A (en) * 1990-12-31 1992-03-24 Air Products And Chemicals, Inc. Processes for the chemical vapor deposition of copper and etching of copper
DE4402788A1 (de) * 1994-01-31 1995-08-10 Emil Krechen Industrievertretu Verfahren zum Abtragen von Metallen
DE10313517B4 (de) 2003-03-25 2006-03-30 Atotech Deutschland Gmbh Lösung zum Ätzen von Kupfer, Verfahren zum Vorbehandeln einer Schicht aus Kupfer sowie Anwendung des Verfahrens

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3476624A (en) * 1966-02-08 1969-11-04 Fmc Corp Process of etching copper circuits
US3597290A (en) * 1968-03-25 1971-08-03 Mitsubishi Edogawa Kagaku Kk Method for chemically dissolving metal
JPS5010698B1 (it) * 1970-12-26 1975-04-23
SE425007B (sv) * 1976-01-05 1982-08-23 Shipley Co Stabil etslosning omfattande svavelsyra och veteperoxid samt anvendning av densamma

Also Published As

Publication number Publication date
FR2392100A1 (fr) 1978-12-22
DE2823068A1 (de) 1978-12-14

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