JPS52107247A - Etching liquid - Google Patents

Etching liquid

Info

Publication number
JPS52107247A
JPS52107247A JP2436676A JP2436676A JPS52107247A JP S52107247 A JPS52107247 A JP S52107247A JP 2436676 A JP2436676 A JP 2436676A JP 2436676 A JP2436676 A JP 2436676A JP S52107247 A JPS52107247 A JP S52107247A
Authority
JP
Japan
Prior art keywords
etching liquid
etching
liquid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2436676A
Other languages
Japanese (ja)
Other versions
JPS6053461B2 (en
Inventor
Chiyuuichi Niwano
Yoshio Harada
Masahiro Shioda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Priority to JP2436676A priority Critical patent/JPS6053461B2/en
Publication of JPS52107247A publication Critical patent/JPS52107247A/en
Publication of JPS6053461B2 publication Critical patent/JPS6053461B2/en
Expired legal-status Critical Current

Links

JP2436676A 1976-03-06 1976-03-06 Etching solution used to expose crystal defects in silicon wafers Expired JPS6053461B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2436676A JPS6053461B2 (en) 1976-03-06 1976-03-06 Etching solution used to expose crystal defects in silicon wafers

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2436676A JPS6053461B2 (en) 1976-03-06 1976-03-06 Etching solution used to expose crystal defects in silicon wafers

Publications (2)

Publication Number Publication Date
JPS52107247A true JPS52107247A (en) 1977-09-08
JPS6053461B2 JPS6053461B2 (en) 1985-11-26

Family

ID=12136184

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2436676A Expired JPS6053461B2 (en) 1976-03-06 1976-03-06 Etching solution used to expose crystal defects in silicon wafers

Country Status (1)

Country Link
JP (1) JPS6053461B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7314766B2 (en) 2002-11-14 2008-01-01 Kabushiki Kaisha Toshiba Semiconductor wafer treatment method, semiconductor wafer inspection method, semiconductor device development method and semiconductor wafer treatment apparatus
CN103361643A (en) * 2013-07-22 2013-10-23 中国科学院苏州纳米技术与纳米仿生研究所 GaN corrosive liquid

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02126754U (en) * 1989-03-24 1990-10-18

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7314766B2 (en) 2002-11-14 2008-01-01 Kabushiki Kaisha Toshiba Semiconductor wafer treatment method, semiconductor wafer inspection method, semiconductor device development method and semiconductor wafer treatment apparatus
CN103361643A (en) * 2013-07-22 2013-10-23 中国科学院苏州纳米技术与纳米仿生研究所 GaN corrosive liquid

Also Published As

Publication number Publication date
JPS6053461B2 (en) 1985-11-26

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