JPS52115182A - Production of photo mask for automatic alignment - Google Patents

Production of photo mask for automatic alignment

Info

Publication number
JPS52115182A
JPS52115182A JP3120376A JP3120376A JPS52115182A JP S52115182 A JPS52115182 A JP S52115182A JP 3120376 A JP3120376 A JP 3120376A JP 3120376 A JP3120376 A JP 3120376A JP S52115182 A JPS52115182 A JP S52115182A
Authority
JP
Japan
Prior art keywords
production
photo mask
automatic alignment
mask
markd
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3120376A
Other languages
Japanese (ja)
Inventor
Joichiro Kageyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP3120376A priority Critical patent/JPS52115182A/en
Publication of JPS52115182A publication Critical patent/JPS52115182A/en
Pending legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

PURPOSE: To obtain a mask which improves the accuracy of pitch position by performing printing of element patterns and target markd by one repeat process.
COPYRIGHT: (C)1977,JPO&Japio
JP3120376A 1976-03-24 1976-03-24 Production of photo mask for automatic alignment Pending JPS52115182A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3120376A JPS52115182A (en) 1976-03-24 1976-03-24 Production of photo mask for automatic alignment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3120376A JPS52115182A (en) 1976-03-24 1976-03-24 Production of photo mask for automatic alignment

Publications (1)

Publication Number Publication Date
JPS52115182A true JPS52115182A (en) 1977-09-27

Family

ID=12324849

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3120376A Pending JPS52115182A (en) 1976-03-24 1976-03-24 Production of photo mask for automatic alignment

Country Status (1)

Country Link
JP (1) JPS52115182A (en)

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