JPS52114278A - Fine pattern transfer device - Google Patents

Fine pattern transfer device

Info

Publication number
JPS52114278A
JPS52114278A JP2988776A JP2988776A JPS52114278A JP S52114278 A JPS52114278 A JP S52114278A JP 2988776 A JP2988776 A JP 2988776A JP 2988776 A JP2988776 A JP 2988776A JP S52114278 A JPS52114278 A JP S52114278A
Authority
JP
Japan
Prior art keywords
transfer device
fine pattern
pattern transfer
transfer
patterns
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2988776A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5319905B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Tetsunori Wada
Shusuke Kotake
Shinichiro Takasu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP2988776A priority Critical patent/JPS52114278A/ja
Publication of JPS52114278A publication Critical patent/JPS52114278A/ja
Publication of JPS5319905B2 publication Critical patent/JPS5319905B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP2988776A 1976-03-22 1976-03-22 Fine pattern transfer device Granted JPS52114278A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2988776A JPS52114278A (en) 1976-03-22 1976-03-22 Fine pattern transfer device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2988776A JPS52114278A (en) 1976-03-22 1976-03-22 Fine pattern transfer device

Publications (2)

Publication Number Publication Date
JPS52114278A true JPS52114278A (en) 1977-09-24
JPS5319905B2 JPS5319905B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1978-06-23

Family

ID=12288471

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2988776A Granted JPS52114278A (en) 1976-03-22 1976-03-22 Fine pattern transfer device

Country Status (1)

Country Link
JP (1) JPS52114278A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Also Published As

Publication number Publication date
JPS5319905B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1978-06-23

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