JPS5210073A - Equipment for liquid phase epitaxial growth - Google Patents

Equipment for liquid phase epitaxial growth

Info

Publication number
JPS5210073A
JPS5210073A JP8653875A JP8653875A JPS5210073A JP S5210073 A JPS5210073 A JP S5210073A JP 8653875 A JP8653875 A JP 8653875A JP 8653875 A JP8653875 A JP 8653875A JP S5210073 A JPS5210073 A JP S5210073A
Authority
JP
Japan
Prior art keywords
liquid phase
equipment
epitaxial growth
phase epitaxial
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8653875A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5426467B2 (enrdf_load_html_response
Inventor
Kazuhisa Murata
Takeshi Sakurai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to JP8653875A priority Critical patent/JPS5210073A/ja
Publication of JPS5210073A publication Critical patent/JPS5210073A/ja
Publication of JPS5426467B2 publication Critical patent/JPS5426467B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Led Devices (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP8653875A 1975-07-14 1975-07-14 Equipment for liquid phase epitaxial growth Granted JPS5210073A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8653875A JPS5210073A (en) 1975-07-14 1975-07-14 Equipment for liquid phase epitaxial growth

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8653875A JPS5210073A (en) 1975-07-14 1975-07-14 Equipment for liquid phase epitaxial growth

Publications (2)

Publication Number Publication Date
JPS5210073A true JPS5210073A (en) 1977-01-26
JPS5426467B2 JPS5426467B2 (enrdf_load_html_response) 1979-09-04

Family

ID=13889765

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8653875A Granted JPS5210073A (en) 1975-07-14 1975-07-14 Equipment for liquid phase epitaxial growth

Country Status (1)

Country Link
JP (1) JPS5210073A (enrdf_load_html_response)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5254371A (en) * 1975-10-30 1977-05-02 Nippon Telegr & Teleph Corp <Ntt> Liquid phase epitaxial growth method
JPS5261958A (en) * 1975-11-18 1977-05-21 Matsushita Electric Ind Co Ltd Method and device for liquid phase crystal crowth
JPS52146554A (en) * 1976-05-31 1977-12-06 Nippon Telegr & Teleph Corp <Ntt> Multilayer epitaxial growth and its apparatus

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5254371A (en) * 1975-10-30 1977-05-02 Nippon Telegr & Teleph Corp <Ntt> Liquid phase epitaxial growth method
JPS5261958A (en) * 1975-11-18 1977-05-21 Matsushita Electric Ind Co Ltd Method and device for liquid phase crystal crowth
JPS52146554A (en) * 1976-05-31 1977-12-06 Nippon Telegr & Teleph Corp <Ntt> Multilayer epitaxial growth and its apparatus

Also Published As

Publication number Publication date
JPS5426467B2 (enrdf_load_html_response) 1979-09-04

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